Abstract:The need for more energy-efficient solid-state switches beyond complementary metal-oxide-semiconductor (CMOS) transistors has become a major concern as the power consumption of electronic integrated circuits (ICs) steadily increases with technology scaling. Nano-Electro-Mechanical (NEM) relays control current flow by nanometer-scale motion to make or break physical contact between electrodes, and offer advantages over transistors for low-power digital logic applications: virtually zero leakage current for negligible static power consumption; the ability to operate with very small voltage signals for low dynamic power consumption; and robustness against harsh environments such as extreme temperatures. Therefore, NEM logic switches (relays) have been investigated by several research groups during the past decade. Circuit simulations calibrated to experimental data indicate that scaled relay technology can overcome the energy-efficiency limit of CMOS technology. This paper reviews recent progress toward this goal, providing an overview of the different relay designs and experimental results achieved by various research groups, as well as of relay-based IC design principles. Remaining challenges for realizing the promise of nano-mechanical computing, and ongoing efforts to address these, are discussed.

Deviations from the Paschen's law in air and nitrogen are investigated for gaps from 100 nm to 10 μm, by using a high precision electrode positioning system. The deviation is observed when electrode gaps are smaller than 4 μm at atmospheric pressure. At distances lower than 1 μm, a nearly constant average breakdown field of 350 V/μm is evidenced in both gases with Au and Ru electrodes. A metallic plasma initiated by field emission from the cathode can explain the reduction of the breakdown voltage at such low gaps. In ambient air, the existence of a pre-breakdown current is also evidenced, probably due to the presence of water adsorbed on electrodes.