Magnetic field response of doubly clamped magnetoelectric microelectromechanical AlN-FeCo resonators

Bennett, Steven; Baldwin, Jeffrey W.; Staruch, Margo; Matis, Bernard R.; LaComb, Julie A.; Erve, O.M.J. van ‘t; Bussmann, K.; Metzler, Meredith; Gottron, Norman; Zappone, W.; LaComb, R.; Finkel, Peter

doi:10.1063/1.5011728

Cited by 34 publications

(16 citation statements)

References 32 publications

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“…The delta-E effect of the Young’s modulus has especially been studied thoroughly in soft magnetic amorphous materials [ 12 , 13 , 14 , 15 , 16 , 17 , 18 ]. It was used for magnetic field sensing with magnetoelectric plate resonators [ 19 , 20 , 21 , 22 ] and beam structures [ 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 ]. Such resonators are operated in bending or bulk modes and some have achieved limits of detection down to the sub-nT regime at low frequencies.…”

Section: Introductionmentioning

confidence: 99%

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Spetzler

Голубева

Friedrich

et al. 2021

Sensors

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Magnetoelectric resonators have been studied for the detection of small amplitude and low frequency magnetic fields via the delta-E effect, mainly in fundamental bending or bulk resonance modes. Here, we present an experimental and theoretical investigation of magnetoelectric thin-film cantilevers that can be operated in bending modes (BMs) and torsion modes (TMs) as a magnetic field sensor. A magnetoelastic macrospin model is combined with an electromechanical finite element model and a general description of the delta-E effect of all stiffness tensor components Cij is derived. Simulations confirm quantitatively that the delta-E effect of the C66 component has the promising potential of significantly increasing the magnetic sensitivity and the maximum normalized frequency change ∆fr. However, the electrical excitation of TMs remains challenging and is found to significantly diminish the gain in sensitivity. Experiments reveal the dependency of the sensitivity and ∆fr of TMs on the mode number, which differs fundamentally from BMs and is well explained by our model. Because the contribution of C11 to the TMs increases with the mode number, the first-order TM yields the highest magnetic sensitivity. Overall, general insights are gained for the design of high-sensitivity delta-E effect sensors, as well as for frequency tunable devices based on the delta-E effect.

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Section: Introductionmentioning

confidence: 99%

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Spetzler

Голубева

Friedrich

et al. 2021

Sensors

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show abstract

“…Liu et al [6] designed and fabricated strain-sensitive spin valves with a composite Fe-Ga/Fe-Co layer on a flexible substrate. Bennett et al [7] demonstrated the doubly clamped resonator design as a magnetoelectric aluminum nitride/Fe-Co thin film heterostructure. Wang et al [8] also demonstrated the magnetostrictive effect of Fe-Co thin films on a lithium niobate substrate.…”

Section: Introductionmentioning

confidence: 99%

Fabrication, Modeling and Characterization of Magnetostrictive Short Fiber Composites

et al. 2020

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Magnetostrictive materials have a wide variety of applications due to their great capability as sensors and energy-harvesting devices. However, their brittleness inhibits their applications as magnetostrictive devices. Recently, we developed a continuous magnetostrictive Fe-Co-fiber-embedded epoxy matrix composite to increase the flexibility of the material. In this study, we fabricated random magnetostrictive Fe-Co short fiber/epoxy composite sheets. It was found that the discontinuous Fe-Co fiber composite sheet has the magnetostrictive properties along the orientation parallel to the length of the sheet. Finite element computations were also carried out using a coupled magneto-mechanical model, for the representative volume element (RVE) of unidirectional aligned magnetostrictive short fiber composites. A simple model of two-dimensional, randomly oriented, magnetostrictive short fiber composites was then proposed and the effective piezomagnetic coefficient was determined. It was shown that the present model is very accurate yet relatively simple to predict the piezomagnetic coefficient of magnetostrictive short fiber composites. This magnetostrictive composite sheet is expected to be used as a flexible smart material.

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“…Alternatively, we calculate the intrinsic magnetic noise (b n ) of the magnetic sensor, which is determined by the thermomechanical noise, as expressed by [25],…”

Section: Resultsmentioning

confidence: 99%

Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Zhang

Sang

et al. 2020

Materials Research Letters

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Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of 4nT/ √ Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones. IMPACT STATEMENT The first high-temperature MEMS magnetic sensor over 573 K super to the present ones is realized by coupling a magneto-strictive FeGa film with a diamond MEMS resonator.

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Magnetic field response of doubly clamped magnetoelectric microelectromechanical AlN-FeCo resonators

Cited by 34 publications

References 32 publications

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Fabrication, Modeling and Characterization of Magnetostrictive Short Fiber Composites

Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

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