The composition dependence of the magnetic as well as structural properties of epitaxial 4 -40 nm Fe 3 Si thin films on MgO͑001͒ have been investigated using ferromagnetic resonance, superconducting quantum interference device magnetometry, and magneto-optical Kerr effect. Magnetic anisotropy energy, g factor, and magnetization were determined for different samples with Si concentrations of 20%, 25%, or 30% at room temperature. Additionally, different annealing procedures were applied. The magnetization was determined to be on the order of 0 M Ϸ 1 T. It was found that the films have a dominating cubic anisotropy K 4 Ϸ 3 ϫ 10 3 J / m 3 which depends on the thermal treatment of the film and is about 1 order of magnitude smaller than the one of bulk Fe. A small uniaxial in-plane anisotropy of interfacial nature was detected. The perpendicular uniaxial anisotropy term, which is dominated by an interface contribution, favors a perpendicular easy axis. From frequency-dependent ferromagnetic resonance measurements an isotropic g factor was extracted g = 2.075͑5͒ for 8 and 40 nm samples and g = 2.080͑5͒ for the 4 nm one. Different thermal treatments of the sample showed no influence on the g factor. The magnetic anisotropy fields and g factor decrease linearly as the Si concentration increases within the D0 3 regime.