Macro Stress Mapping on Thin Film Buckling

Abstract

: Thin films deposited by Physical Vapour Deposition techniques on substrates generally exhibit large residual stresses which may be responsible of thin film buckling in the case of compressive stresses. Since the 80's, a lot of theoretical work has been done to develop mechanical models but only a few experimental work has been done on this subject to support these theoretical approaches and nothing concerning local stress measurement mainly because of the small dimension of the buckling (few 10 th µm). This paper deals with the application of micro beam Xray diffraction available on synchrotron radiation sources for stress mapping analysis of gold thin film buckling.

Strain-arranged structure in amorphous films

“…Thin films prepared by physical vapor deposition techniques exhibit high stress that is generated during the first stage of deposition by the particles adhering to the substrate. 2 Stress and stress relaxation play an important role in the initial stage of film growth, in film microstructure, and in degradation or enhancement of the properties of thin films (see, e.g., Refs. 3 and 4).…”