Lumped Element Modeling of Piezoelectric Cantilever Beams for Vibrational Energy Reclamation

Kasyap, Anurag; Phipps, Alex; Sheplak, Mark; Ngo, Khai D. T.; Nishida, Toshikazu; Cattafesta, Louis N.

doi:10.1115/imece2006-14879

Cited by 14 publications

(15 citation statements)

References 14 publications

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“…3 is much less complex than a fully distributed electromechanical model, an even further simplified resonant model, shown in Fig. 4, is often used for energy harvesting modeling [5], [9], [10], [13], [15], [23]- [26]. This simplified resonant LEM resides completely within the electrical domain, unlike the full LEM in Fig.…”

Section: A Transducer Modelingmentioning

confidence: 97%

“…2, and a pulsed resonant converter (PRC) power converter topology. Previous works have separately examined the modeling of the transducer beam [1], [13] and implementation of the PRC [11], [14]- [17]; however, the combined modeling of the two components with the intent of a coupled, system-level design has not been thoroughly explored. Varying degrees of system-level models have been developed for a number of power converter topologies [18]- [20]; however, this list does not include the PRC.…”

Section: Introductionmentioning

confidence: 99%

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System Modeling of Piezoelectric Energy Harvesters

Phipps

Nishida

2012

IEEE Trans. Power Electron.

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For piezoelectric-based, vibration energy harvesting systems, a simplified resonant model is typically used to represent the piezoelectric transducer. Furthermore, the total amount of harvested power is calculated assuming an ideal and lossless power converter. A coupled, system-level model is developed that includes parasitic losses in the power converter for a system comprised of a cantilevered transducer beam and pulsed resonant converter. The accuracy of the system-level model is validated with experimental data, and it is shown that the simplified resonant model underpredicts the total harvested power by approximately 30% for the implemented system. In addition to capturing the electrical domain behavior of the system, the system-level model is also shown to accurately predict the effect of energy harvesting on the beam mechanics.

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Section: A Transducer Modelingmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

System Modeling of Piezoelectric Energy Harvesters

Phipps

Nishida

2012

IEEE Trans. Power Electron.

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“…This can be done under the assumption that a perfect bond exists between the beam and the piezoelectric material [8].…”

Section: Mechanical Modelingmentioning

confidence: 99%

Piezoelectricity and Energy Harvester Modelling

Hehn

Manoli

2014

CMOS Circuits for Piezoelectric Energy Harvesters

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The direct piezoelectric effect is well-suited for harnessing environmental vibrations and to convert them into usable electrical energy. Coated on a cantilever beam, piezoelectric ceramics allows simple energy harvesting without additional mechanical structures. In addition, relatively small external excitations result in output voltages of several volts which do not require low-efficient startup mechanisms as known from thermoelectric generators. In order to give the reader a feeling about what is important for developing interface circuitry for piezoelectric energy harvesters, the basics of piezoelectricity and its usage in energy harevsting are presented in this chapter. After the physical conversion principle has been introduced roughly, its application in cantilever beam harvesters is explained. The last two sections are about the modeling of kinetic, vibration based energy harvesters in general and piezoelectric energy harvesters in particular. Electrical equivalent circuits of the energy harvesters are essential for the simulation of entire energy harvesting systems composed of the mechanical harvester structure and the electrical interface circuitry on one hand, and on the other hand to understand their behavior by means of analytical calculations. Theoretical Background of the Piezoelectric EffectThe theoretical treatment of the piezoelectric effect presented in this section is intentionally kept very superficial, because this book's focus is on the interface circuitry for piezoelectric energy harvesters, not the harvesters themselves. Nevertheless, the reader gets a basic introduction to this topic in order to be able to understand the challenges linked with energy extraction out of piezoelectric energy harvesters. A more thorough analysis of piezoelectricity can be found in [7].

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“…A large proof mass is designed and integrated at the end of the supporting beam to achieve a low resonant frequency and increase output power. The fabrication process is as shown in Figure 8 [20,21]: Grow thermal oxide on silicon on insulator (SOI) wafer.Sputter deposit Ti/Pt (bottom electrode), and Al (top electrode), spin coat sol-gel PZT piezoelectric layer.Pattern and etch electrode, PZT and SiO 2 layer, deep reactive ion etching (DRIE) Si device layer.Plasma enhanced chemical vapor deposition (PECVD) deposit oxide, pattern and etch via.Pattern and etch contact pads.DRIE from backside, dicing and releasing.…”

Section: Fabricationmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit

Hua

Zhou

Deng

et al. 2014

Sensors

168

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This paper presents a micro-electro-mechanical system (MEMS) piezoelectric power generator array for vibration energy harvesting. A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investigate the influence of the geometric parameters on the output voltage. Based on simulation results, a MEMS Pb(Zr,Ti)O3 (PZT) cantilever array with an integrated large Si proof mass is designed and fabricated to improve output voltage and power. Test results show that the fabricated generator, with five cantilever beams (with unit dimensions of about 3 × 2.4 × 0.05 mm3) and an individual integrated Si mass dimension of about 8 × 12.4 × 0.5 mm3, produces a output power of 66.75 μW, or a power density of 5.19 μW·mm−3·g−2 with an optimal resistive load of 220 kΩ from 5 m/s2 vibration acceleration at its resonant frequency of 234.5 Hz. In view of high internal impedance characteristic of the PZT generator, an efficient autonomous power conditioning circuit, with the function of impedance matching, energy storage and voltage regulation, is then presented, finding that the efficiency of the energy storage is greatly improved and up to 64.95%. The proposed self-supplied energy generator with power conditioning circuit could provide a very promising complete power supply solution for wireless sensor node loads.

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Lumped Element Modeling of Piezoelectric Cantilever Beams for Vibrational Energy Reclamation

Cited by 14 publications

References 14 publications

System Modeling of Piezoelectric Energy Harvesters

System Modeling of Piezoelectric Energy Harvesters

Piezoelectricity and Energy Harvester Modelling

A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit

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