Lukács y las robinsonadas del siglo XVIII:

Koval, Martín Ignacio; Lenga, Jésica

doi:10.26512/cerrados.v27i47.19676

Cited by 1 publication

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“…eight times lower than the estimated surface depression rate in the low-fluence range of the irradiation with He + ions in which only the shrinking mechanism occurs. These results are consistent with previously published results [13], which show that the formation of a highly carbonized layer on the PMMA surface significantly retards the sputtering process. Figure 4a and confirmed by AFM imaging in Figure 4b.…”

Section: Resultssupporting

confidence: 93%

“…An additional and important aspect is that polymer materials cannot shrink infinitely with an increase in the irradiation fluence and, at a certain fluence, the material capacity to shrink decreases, which explains the saturation effect in the case of irradiation with He + ions. In the case of PMMA, the high irradiation fluence results in the formation of a compact carbon-rich material that can no longer shrink [13]. Taking this into consideration, we assume that a combination of several factors is responsible for the reduction in the surface height upon irradiation with Ne + and Ga + ions in comparison to the irradiation with He + ions.…”

Section: Resultsmentioning

confidence: 99%

“…PMMA and PC polymers are especially interesting for many reasons: PMMA is widely used as a positive resist for X-ray, deep UV [8], elec-tron and ion-beam lithography [9]. Structural transformation and volume shrinkage of PMMA under ion irradiation have been reported in several publications [6,7,[9][10][11][12][13]. PC is the second most sold thermoplastic polymer.…”

Section: Introductionmentioning

confidence: 99%

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Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

Chiriaev

Tavares

Adashkevich

et al. 2020

Beilstein J. Nanotechnol.

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This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk of the polymer. Effects of subsurface and surface processes on the surface morphology have been studied for three polymer materials: poly(methyl methacrylate), polycarbonate, and polydimethylsiloxane, by using focused ion beam irradiation with He+, Ne+, and Ga+. Thin films of a Pt60Pd40 alloy and of pristine Au were used to compare the patterning of thin films with different microstructures. We show that the height of Pt60Pd40 thin films deposited onto poly(methyl methacrylate) and polycarbonate substrates can be patterned by He+ ion beams with ultrahigh precision (nanometers) while preserving in-plane features, at the nanoscale, of the pre-deposited films. Ion irradiation of the Au-coated samples results in delamination, bulging, and perforation of the Au film, which is attributed to the accumulation of gases from radiolysis at the film–substrate interface. The irradiation with Ne+ and Ga+ ions destroys the films and roughens the surface due to dominating sputtering processes. A very different behavior, resulting in the formation of complex, multiscale 3D patterns, is observed for polydimethylsiloxane samples. The roles of the metal film structure, elastic properties of the polymer substrate, and irradiation-induced mechanical strain in the patterning process are elaborated and discussed.

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Section: Resultssupporting

confidence: 93%

Section: Resultsmentioning

confidence: 99%