&lt;title&gt;UV laser photolysis of Mo(CO)6 and molybdenum film deposition&lt;/title&gt;

Баграташвили, В. Н.; Evseev, A. V.; Kamayev, S. V.; Markov, Michael A.

doi:10.1117/12.23703

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1995

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“…UV photolysis of gaseous transition metal carbonyls is the subject of intensive investigation. [1][2][3][4] This process allows to obtain films of refractory metals on different substrates at room temperature [5][6][7][8] and to initiate some chemical reaction. 9'1 It was found recently that atomic and molecular clusters as well as microparticles are formed as a result of chromium, wolfram and molybdenum hexacarbonyl photolysis.…”

Section: Introductionmentioning

confidence: 99%

Formation of Microparticles Initiated by Excimer Laser Photolysis of Mo(CO)₆

1995

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Formation of microparticles initiated by XeCl laser radiation photolysis of Mo(CO)6 mixed with buffer gas was studied. It was shown that micron-sized heavy objects (microparticles) of little mobility were formed and scattered the beam of the He-Ne probe laser. The microparticle mass and size were determined from probe laser beam scattering. The average density of microparticle was estimated (ρ ≈ 0.1 g·cm-3).

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