2001
DOI: 10.1117/12.448244
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<title>Solar cells with porous silicon as antireflection layer</title>

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Cited by 3 publications
(8 citation statements)
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“…Then samples immediately were rinsed in ethanol or methanol and dried under pure nitrogen flow. Semitransparent aluminum layers (∼ 0.1 µm) were sputtered on the front-face area of the samples having prepared PS layer for measurements of the capacitance, as described in [2]. Deposition was performed through a mask at a sliding angle.…”
Section: Preparation Of the Samplesmentioning
confidence: 99%
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“…Then samples immediately were rinsed in ethanol or methanol and dried under pure nitrogen flow. Semitransparent aluminum layers (∼ 0.1 µm) were sputtered on the front-face area of the samples having prepared PS layer for measurements of the capacitance, as described in [2]. Deposition was performed through a mask at a sliding angle.…”
Section: Preparation Of the Samplesmentioning
confidence: 99%
“…However, as shown in [2,4,8], for determination of porosity it is necessary to know the layer thickness, or, conversely, the layer thickness may be established, if the value of porosity is known. So, in [2,4] the layer thickness was determined from interference maxima in reflection spectra of PS layers. This produces additional inconvenience and, moreover, the corresponding interference pattern is not always recorded in the curves of reflection spectra because of, in particular, a small thickness of a PS layer.…”
Section: Introductionmentioning
confidence: 99%
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“…There are a variety of other techniques to make thin coatings with tunable refractive index such as chemical etching, vacuum deposition, and sol–gel method. One approach is to roughen the substrate by chemical etching to produce subvisible‐wavelength scale pores . The main drawbacks are time consuming and the use of hazardous etchants such as HF and H 2 SiF 4 .SiF 4 .…”
Section: Introductionmentioning
confidence: 99%
“…With the use of PS it is possible to fabricate, in a single technological cycle, silicon light-emitting diodes and large integrated circuits with optoelectronic properties. However, a developed surface of PS, a large and controllable width of the forbidden band and a small effective index of refraction make it possible to employ this material in other fields, such as chemical sensors and antireflection coatings for silicon solar cells (see, e.g., [1][2][3][4][5][6][7][8]).…”
Section: Introductionmentioning
confidence: 99%