&lt;title&gt;Polymer UV-molding for micro-optical systems and O/E-integration&lt;/title&gt;

Dannberg, Peter; Mann, G.; Wagner, L.; Braeuer, Andreas H.

doi:10.1117/12.395684

Cited by 41 publications

(24 citation statements)

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“…12). The prototyped cube measures 60x60x25µm 3 (length x width x height) and the prism structure is 70x70x103 µm 3 Micromap 570) are shown in Fig. 13 and 14.…”

Section: -Photon Polymerizationmentioning

confidence: 99%

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Fabrication technologies for chirped refractive microlens arrays

et al. 2006

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Conventional microlens arrays consist of a repetitive arrangement of a unit cell on a fixed pitch. In a chirped array, the inflexibility of a regular structure has been overcome. Here, the array consists of individually shaped lenses which are defined by a parametric description of the cells optical function. We propose different fabrication methods for chirped microlens arrays and present experimentally obtained data. Reflow of photoresist is an established technology for the fabrication of microlenses with superior optical performance. For the generation of a chirped microlens array the photolithographic mask for patterning the resist to be melted has to be chirped. We present an algorithm for mask generation with an example of an ultra-thin camera objective. Inherent to the reflow process stringent limitations to viable surfaces apply. For achieving more arbitrary surfaces, laser lithography and also 2-photon polymerization are employed. In both methods the structures are decomposed into pixels. In laser lithography the local height is converted into an intensity value for the exposure. This variable dose writing locally changes the solubility of the resist in the development process leading to the required surface profile. We propose a writing scheme enabling structure heights of several ten microns with sufficient height discretization. 2-photon polymerization is a rapid prototyping method. Here, a small volume of a UV-curing organic-inorganic co-polymer is hardened in the tight focus of the writing beam. The volume pixel to be exposed is addressed by piezoelectric translation stages. Experimentally obtained structures and performed tests of the optical quality are presented

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“…12). The prototyped cube measures 60x60x25µm 3 (length x width x height) and the prism structure is 70x70x103 µm 3 Micromap 570) are shown in Fig. 13 and 14.…”

Section: -Photon Polymerizationmentioning

confidence: 99%

“…In Section 2 we focus on reflow of photoresist which leads to very smooth and well defined surfaces and thus microlenses with superior optical performance [2][3][4] . Here, the variety of producible surfaces is limited to symmetric profiles.…”

Section: Introductionmentioning

confidence: 99%

Fabrication technologies for chirped refractive microlens arrays

et al. 2006

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“…The master for the redirector with aberration correction was fabricated by variable dose writing with a modified Heidelberg DWL 400 laser writer 11 . This is followed by a replication step forming structures in temperature stable UVcuring polymer on a float-glass substrate 12 . The replicated wafers are coated with gold and then singularized by a wafer dicing saw.…”

Section: Realizationmentioning

confidence: 99%

High-brightness fiber-coupling schemes for diode laser bars

et al. 2005

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ev YA fastaxis J I mittr I 7 /v / [ siow axis / .ABSTRACT Fiber-coupling of high-brightness laser diode bars requires shaping and superposition of the images of the individual emitters on the fiber facet. Employment of micro-optical elements together with bulk-optical components enables the design and manufacturing of efficient coupling schemes with small form-factor. In this presentation we describe optical system design, manufacturing of micro-optical elements, system integration and characterization of two coupling schemes: The beam twister approach uses tilted cylindrical mirolens telescopes to rotate the images of the individual emitters by 90° with subsequent beam compression and focusing optics, while a skew ray coupling scheme applies an array of blazed diffractive elements in the pupil plane of a relay optics to superpose the images of the individual emitters. The optics design is based on raytracing procedures, taking into account diffractive effects, which could lower coupling efficiency. Micro-optical components are realized by polymer-on-glass replication of reflow lenses or grating structures manufactured by laser-lithography. System assembly is based on precise glueing with active alignment in the submicrometer range. We realized several optics schemes for coupling of high-power, high-brightness laser diode bars into fibers with 100µm core diameter. The systems are compared with each other with respect to achievable coupling efficiency, adjustment tolerances and pointing stability.

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“…In this investigation, we used an ultraviolet (UV) molding technique [15] because of the following advantages. In the UV molding process, a thin polymer layer (with thickness of 10-100 m depending on structure height) is generated on top of a highly transparent, optically homogeneous, precise, and mechanically stable glass substrate.…”

Section: B Replicationmentioning

confidence: 99%

Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

Heming

Wittig

Dannberg

et al. 2008

J. Lightwave Technol.

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Abstract-Design, fabrication, and experimental testing of an integrated microoptical module for interconnection are reported. The systems integration is based on the concept of planar-integrated free-space optics. The module combines diffractive-reflective and refractive microoptics. The diffractive elements were fabricated by binary lithography and reactive ion etching. The refractive elements were made by analog lithography using a high-energy beam sensitive mask and replication in Ormocer. The fabricated module implemented a simple one-dimensional optical interconnect. Two versions were implemented for which insertion losses of approximately 8 and 4.5 dB were measured, respectively.

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<title>Polymer UV-molding for micro-optical systems and O/E-integration</title>

Cited by 41 publications

References 0 publications

Fabrication technologies for chirped refractive microlens arrays

Fabrication technologies for chirped refractive microlens arrays

High-brightness fiber-coupling schemes for diode laser bars

Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

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