&lt;title&gt;Polymer microsystems by excimer laser ablation: from rapid prototyping to large-number fabrication&lt;/title&gt;

Klotzbuecher, Thomas; Braune, Torsten; Sigloch, S.; Hossfeld, Jens; Neumeier, Michel; Bauer, Hans-Dieter; Ehrfeld, W.

doi:10.1117/12.432523

Cited by 10 publications

(7 citation statements)

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“…To keep the sensor as simple as possible, the prism is micro machined directly into a polymer chip by laser ablation. For a more detailed discussion of the laser ablation process applied [7,8] . The chip is made of a cycloolefin copolymer (COC).…”

Section: Sensor Designmentioning

confidence: 99%

Active integrated components for fluid control in automatic analytical chip-based systems

et al. 2009

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A robust optical sensor for liquid control in fluidic channels is reported. The sensor operates on light intensity modulation resulting from alteration of total internal reflection into partial reflection. When a liquid guided in a channel covers an integrated prism, the total internal reflection is changed into a partial reflection, resulting in an intensity modulation of the reflected light. The set-up comprises a fibre which is built in a coupler unit with integrated LED and photodiode as well as a prism micro-machined directly into a micro-fluidic polymeric channel by laser ablation. The Prism is of 45-90-45° type with a dimension of 0.5 mm x 1 mm x 2 mm. In this design the radiation of the LED light source is transmitted and collected from the prism by a 50:50 fibre coupler by means of total or partial internal reflection. The sensor was characterised by filling alternately the channel with water and air. The influence of stray light onto the sensor signal was tested by applying a strong uncollimated illumination of the channel. Only a small increase in the output signal level in the presence of air but a strong increase in case of the presence of water could be detected.

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Section: Sensor Designmentioning

confidence: 99%

Active integrated components for fluid control in automatic analytical chip-based systems

et al. 2009

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“…The PMMA resist ablation presented in this paper has been performed by an ArF Excimer laser at λ=193 nm, integrated in an Exitech micromachining workstation. A more detailed description of the ablation setup has already been given elsewhere 16,17,18 . In case of the POF coupler, ablation is performed down to the titanium substrate, acting as an etch stop and allowing electroforming direct onto the Ti substrate (step 3).…”

Section: Laser-ligamentioning

confidence: 99%

Fabrication of optical 1x2 POF couplers using the laser-LIGA technique

et al. 2003

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Plastic optical fibres (POF) continuously gained its importance during the last decade, since they are widely used in automotive applications for optical data communications (for e.g. MOST). The application of POF for in-flightentertainment (IFE) optical networks in civil aircraft cabin areas is currently under investigation. Since it is expected that the optical networks will develop from a point-to-point network architecture to more complicated structures there will be a need for optical couplers distributing the signals to different suppliers. Typical applications would be for e.g. the distribution of optical data to IFE implemented within single seats of a seat row of an airplane. Within this work the fabrication of an optical 1x2 POF coupler by the Laser-LIGA technique is demonstrated. The Laser-LIGA technique compared to standard X-ray lithography is simpler and more cost effective. Moreover, the Laser ablation technique also allows rapid prototyping of the same structures. The POF couplers fabricated by this technology show insertion loss values down to about 5.6 dB, depending on the waveguide core material and exhibit good uniformity values in the order of 0.1 dB.

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“…SPIE Vol. 4559 54 (a) Beam structure (b) Ramps, channels and bars Mass production using batch type processing methods can then be achieved using electroforming LIGA (8)(9)(10) or injection moulding processes (11,12) . Figure 4 shows examples of uv-laser micromachined 3D-structures in polymers which when used with the LIGA process of electroforming, can be replicated in metal -a process now known as Laser LIGA.…”

Section: Mems Device Structuresmentioning

confidence: 99%