&lt;title&gt;Laser micromachining for manufacturing MEMS devices&lt;/title&gt;

Gower, Malcolm C.

doi:10.1117/12.443040

Cited by 18 publications

(8 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Micromachines 2020, 11,178 10 of 18 depth of cut and the number of laser micromachining passes. Characterizing this relationship allows for the fabrication of microchannels of specific depths in PDMS by varying the number of laser passes.…”

Section: Laser Characterizationmentioning

confidence: 99%

“…Shadow masking technology is an integral part of fabricating micro/nanostructures for prototyping in microelectronics, optical, microfluidic, MEMS, packaging, and biomedical lab-on-a-chip applications [11,23]. Typical methods for producing shadow masks, such as photolithography and deep reactive ion etching (DRIE) or ion beam milling, are expensive, require cleanroom-based fabrication, expensive vacuum equipment, ultra-pure air filtration, and advanced know-how [3,50].…”

Section: Shadow Masksmentioning

confidence: 99%

“…Laser micromachining, specifically, involves the ablation of materials where the features produced by the laser are in the micro-scale [6,7]. Laser micromachining techniques are currently employed in the automobile [8], medical [2,9], semiconductor [10,11], and solar cell industries [12]. Lasers used in micromachining are available in a wide range of wavelengths (ultraviolet to infrared), pulse durations (micro-to femtosecond), and repetition rates (single pulse to megahertz) [6,8].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 µm Shadow Masks and sub-10 µm Interdigitated Electrodes (IDEs) Fabrication

Hart

Rajaraman

2020

Micromachines

View full text Add to dashboard Cite

Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromachining tool by determining the ablation characteristics of six (6) different materials and demonstrating two applications. Both the thermodynamic theoretical and experimental ablation characteristics of stainless steel (SS) and aluminum are examined at 1064 nm, silicon and polydimethylsiloxane (PDMS) at 532 nm, and Kapton ® and polyethylene terephthalate at 355 nm. We found that the experimental data aligned well with the theoretical analysis. Additionally, two applications of this multimodal laser micromachining technology are demonstrated: shadow masking down to approximately 1.5 µm feature sizes and interdigitated electrode (IDE) fabrication down to 7 µm electrode gap width.

show abstract

Section: Laser Characterizationmentioning

confidence: 99%

Section: Shadow Masksmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 µm Shadow Masks and sub-10 µm Interdigitated Electrodes (IDEs) Fabrication

Hart

Rajaraman

2020

Micromachines

View full text Add to dashboard Cite

show abstract

“…Laser micromachining is extensively used for manufacturing of microparts with micron and submicron resolution in a wide range of applications such as biotechnological, microelectronics, telecommunication, MEMS, and medical applications (Gower 2001). A wide range of materials such as metals, ceramics, and polymers have been successfully micromachined.…”

Section: Laser Micromachining Applicationsmentioning

confidence: 99%

Laser Fabrication and Machining of Materials

2008

View full text Add to dashboard Cite

except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now know or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks and similar terms, even if they are not identifi ed as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights.Printed on acid-free paper. 9 8 7 6 5 4 3 2 1 springer.com v medicine, it is rapidly making headways in the field of biomedicine. As mentioned earlier, Part I provides sufficient basics of lasers and laser processes to spawn thoughts in one's mind for new applications of lasers. Examples of such new applications are described in chapters on laser interference processing, laser shock processing, and laser dressing of grinding wheels. It is hoped that the book will provide further impetus to many more readers to take lasers into new frontiers of applications.Thus, unlike many other books on similar topics, this book deals with the subject of laser-based fabrication and machining in a comprehensive manner. The subject matter in the proposed book extends over a wide range of disciplines that include, but are not limited to, mechanical, electrical/electronics, materials, and manufacturing. Such interdisciplinary discussion of the topic is a need of the time for many undergraduate and graduate academic programs and research activities that themselves are increasingly wielding interdisciplinary flavor. Furthermore, the scope of the subject matter ranging over macro-, to micro-, to nanolevels of processing/ manufacturing is very important to educate and prepare individuals for the next generation manufacturing. In addition, the integration of fundamental principles and physical phenomena governing laser-based fabrication/machining processes and their existing and potential applications have widened the scope of the book across the sectors of academia, research, and industry.

show abstract

“…Laser micromachining of thermoplastics may be performed by lasers covering wavelengths from UV to thermal IR (8-12 lm wavelength). For example, excimer lasers, using step-and-repeat mask illumination, can produce channels with near-vertical sidewalls in thermoplastics (Gower 2001), mainly by photoablation and photodecomposition of the material, from the high UV photon energy. This method produces very little heat and thermal stress in the substrate, and very little re-deposition of ablated material.…”

Section: Introductionmentioning

confidence: 99%

Microfluidic ratio metering devices fabricated in PMMA by CO2 laser

Tweedie

Maguire

2020

Microsyst Technol

View full text Add to dashboard Cite

We describe microfluidic fabrication results achieved using a 10.6 μm CO2 engraving laser on cast PMMA, in both raster and vector mode, with a 1.5″ lens and a High Power Density Focussing Optics lens. Raster written channels show a flatter base and are more U-shaped, while vector written channels are V shaped. Cross-sectional images, and, where possible, stylus profilometry results are presented. The sides of V-grooves become increasing steep with laser power, but broader shallower channels may be produced in vector mode by laser defocus, as illustrated. Smoothing of raster engraved channels by heated IPA etch, and transparency enhancement by CHCl3 vapour treatment are briefly discussed. An asymmetric Y meter is discussed as one method of diluting acid into seawater for dissolved CO2 analysis. Alternatively, microfluidic snake channel restrictors of different lengths in 2 channels may achieve the same result. Samples are fabricated with bases bonded by CHCl3 vapour treatment, and the devices are flow tested with either dilute food dye or DI water. Microfluidics fabricated in this manner have applications in ocean sensing of dissolved CO2 and other analytes, as well as broader sensing measurements, including biomedical sensors.

show abstract

<title>Laser micromachining for manufacturing MEMS devices</title>

Abstract: Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.

Cited by 18 publications

References 16 publications

Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 µm Shadow Masks and sub-10 µm Interdigitated Electrodes (IDEs) Fabrication

Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 µm Shadow Masks and sub-10 µm Interdigitated Electrodes (IDEs) Fabrication

Laser Fabrication and Machining of Materials

Microfluidic ratio metering devices fabricated in PMMA by CO2 laser

Contact Info

Product

Resources

About