<title>One-step stripe waveguide fabrication process for polymer integrated optics</title>

Abstract

Single-mode stripe optical waveguides in poled organic thin films have been fabricated by excimer laser photoablation using wavelengths at 248 nm and 193 nm. The process uses a quartz proximity photomask as a stencil to the collimated laser light. The process also requires relatively low light densities (-20 mJ/cmZ) allowing large areas to be processed with currently available excimer lasers. This one-step process allows the definition of intricate structures without altering film alignment properties necessary to utilize the inherent electro-optic effect. Possible distortion of waveguide structures caused by diffraction effects (such as in waveguide Y-junctions) is examined. Active devices exhibit electro-optic coefficients similar to equivalent planar waveguide devices.