Ultraviolet Laser Technology and Applications 1995
DOI: 10.1016/b978-0-12-237070-0.50013-3
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Micromachining

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“…Three different meshes with three different pore sizes were used to study the pore sizes. Previous studies of etch depth per pulse vs fluence at 248 nm wavelength on PI ablation give some basic idea of the number of pulses and fluence required to perforate 25 μm membrane . At constant fluence, pore size remains almost constant with an increasing number of pulses, as shown in Figure .…”
Section: Resultsmentioning
confidence: 88%
“…Three different meshes with three different pore sizes were used to study the pore sizes. Previous studies of etch depth per pulse vs fluence at 248 nm wavelength on PI ablation give some basic idea of the number of pulses and fluence required to perforate 25 μm membrane . At constant fluence, pore size remains almost constant with an increasing number of pulses, as shown in Figure .…”
Section: Resultsmentioning
confidence: 88%