&lt;title&gt;Micromolding: a powerful tool for large-scale production of precise microstructures&lt;/title&gt;

Weber, Lutz; Ehrfeld, W.; Freimuth, H.; Lacher, M.; Lehr, H.; Pech, Bernhard

doi:10.1117/12.251203

Cited by 60 publications

(47 citation statements)

References 4 publications

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“…It is used to form almost any geometry from a large variety of thermoplastic materials, and almost any plastic part with dimensions in the millimeter to centimeter range will be manufactured with this technology. It is therefore not surprising that attempts have been made to apply this process to microsystem technologies [35,36] for the fabrication of microfluidic devices [27,37]. Figure 5 shows a cross section of an injection-molding machine with the different process steps.…”

Section: Injection Moldingmentioning

confidence: 99%

Polymer microfabrication methods for microfluidic analytical applications

Becker

Gärtner²

2000

Electrophoresis

732

405

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A growing number of microsystem technology (MST) applications, particularly in the field of microfluidics with its applications in the life sciences, have a need for novel fabrication methods which account for substrates other than silicon or glass. We present in this paper an overview of existing polymer microfabrication technologies for microfluidic applications, namely replication methods such as hot embossing, injection molding and casting, and the technologies necessary to fabricate the molding masters. In addition, techniques such as laser ablation and layering techniques are examined. Methods for bonding and dicing of polymer materials, which are necessary for complete systems, are evaluated.

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Section: Injection Moldingmentioning

confidence: 99%

Polymer microfabrication methods for microfluidic analytical applications

Becker

Gärtner²

2000

Electrophoresis

732

405

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“…In recent years, fabrication of polymer based micro components for optical and biomedical applications has gained increasing attention [1]. Micro-molding of polymer-based materials has the advantages of low cost, good biocompatibility, high optical clarity and high impact strength.…”

Section: Introductionmentioning

confidence: 99%

Injection molding micro patterns with high aspect ratio using a polymeric flexible stamper

Park¹,

Lee²,

Moon³

et al. 2011

Express Polym. Lett.

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Abstract. Poor filling occurs during the injection molding process of micro-or nano-scale patterns mainly because the hot polymer melt rapidly cools and its skin quickly solidifies upon contact with the mold surface. In this study, it is proposed to use Polyethylene terephthalate (PET) film coated with patterned polyurethane acrylate (PUA) as an effective thermal barrier. It can significantly hinder heat transfer into the mold during the molding process and thus may keep the melt viscosity low for longer duration. As a result, the replication would be improved not only during the filling phase but also during the packing phase. In order to verify the validity of the use of polymeric stamper, the melt-film interface temperature was evaluated by numerical simulation. Experimental results indicated that patterns possessing widths within the range of one to tens of micrometers and a height of approximately 10 !m were successfully filled and demolded.

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“…The following processes have been used for the production of mold inserts for use in lMIM: Ni, Ni-Fe alloy and tungsten-cobalt alloy mold insert made by LIGA technology (Weber et al 1996;Benzler et al 1998); hard metal and polyimide film mold insert ablated by excimer laser (Shimizu et al 1998); Iron, 316L stainless steel and hard metal (WC-Co10) mold insert made by lMIM; steel mold inserts made by precision engineering techniques such as micro-milling (Weber et al 1996), lEDM and wire-cut erosion; silicon mold insert etched by deep reactive ion etching (DRIE) (Liu et al 2002). In this work, silicon mold inserts with microcavities etched by DRIE were used.…”

Section: Introductionmentioning

confidence: 99%

A variotherm mold for micro metal injection molding

Loh

Tor

et al. 2005

Microsyst Technol

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In this paper, a variotherm mold was designed and fabricated for the production of 316L stainless steel microstructures by micro metal injection molding (lMIM). The variotherm mold incorporated a rapid heating/cooling system, vacuum unit, hot sprue and cavity pressure transducer. The design of the variotherm mold and the process cycle of lMIM using the variotherm mold were described. Experiments were conducted to evaluate the molded microstructures produced using variotherm mold and conventional mold. The experiments showed that microstructures of higher aspect ratio such as /60 lm · height 191 lm and /40 lm · height 174 lm microstructures could be injection molded with complete filling and demolded successfully using the variotherm mold. Molded microstructures with dimensions of /60 lm · height 191 lm were successfully debound and sintered without visual defects.

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<title>Micromolding: a powerful tool for large-scale production of precise microstructures</title>

Cited by 60 publications

References 4 publications

Polymer microfabrication methods for microfluidic analytical applications

Polymer microfabrication methods for microfluidic analytical applications

Injection molding micro patterns with high aspect ratio using a polymeric flexible stamper

A variotherm mold for micro metal injection molding

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