&lt;title&gt;Micro cycloid-gear system fabricated by multiexposure LIGA technique&lt;/title&gt;

Hirata, Toru; Chung, Song-Jo; Hein, H.; Akashi, Tomoyuki; Mohr, J.

doi:10.1117/12.360468

Cited by 3 publications

(3 citation statements)

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“…Here, the mask is a nickel gear [11] that has to be mounted without any clamps or other external connections in order to project the whole toothed circumference onto the diamond. On the other hand, this mask may not move during the rather lengthy period of erosion.…”

Section: Methodsmentioning

confidence: 99%

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Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

Becker¹,

Gspann²,

Krämer³

2001

The European Physical Journal D

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Reactive accelerated cluster erosion (RACE) of single crystal artificial diamond has been used to fabricate various nano-and microstructures. Carbondioxide clusters of about 1000 molecules are accelerated to 100 keV to act as the eroding agent. Using movable shadow masks, the accelerated cluster beam may erode staircase structures acting as an optical grating. A cycloid gear has been generated via a stationary nickel mask. Non-reactive accelerated cluster erosion using argon clusters will be considered for comparison.

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Section: Methodsmentioning

confidence: 99%

“…The upper surface is the original surface since it was covered by the Ni cycloid mask. This toothed wheel mask has been generated via the LIGA process [11]. The image has been obtained by a confocal microscope (NanoFocus).…”

Section: Surface Smoothnessmentioning

confidence: 99%

Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

Becker¹,

Gspann²,

Krämer³

2001

The European Physical Journal D

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“…The columns are typically 2 m long, 50 m wide, and up to 600 m tall. The LiGA process has micrometer resolution capabilities in high aspect ratio structures [31]- [34], good vertical side wall quality, and is scalable for high volume production through injection molding [35].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Preliminary Results for LiGA Fabricated Nickel Micro Gas Chromatograph Columns

Bhushan

Yemane

Overton

et al. 2007

J. Microelectromech. Syst.

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High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-m-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-m-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of 15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within 2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C 6 , C 8 , C 10 , and C 12 was separated in a coated 50 m by 600 m by 0.5 m column in less than 2 s at 70 C.[ 2006-0020]Index Terms-Fast gas chromatography, LiGA, micro gas chromatograph (GC), X-ray lithography.

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Lithographic Fabrication of Mold Inserts

Guttmann¹,

Schulz²,

Saile³

2005

Microengineering of Metals and Ceramics

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<title>Micro cycloid-gear system fabricated by multiexposure LIGA technique</title>

Cited by 3 publications

References 0 publications

Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

Fabrication and Preliminary Results for LiGA Fabricated Nickel Micro Gas Chromatograph Columns

Lithographic Fabrication of Mold Inserts

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