Fabrication and Preliminary Results for LiGA Fabricated Nickel Micro Gas Chromatograph Columns

Abstract

High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-m-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-m-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of 15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within 2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C 6 , C 8 , C 10 , and C 12 was separated in a coated 50 m by 600 m by 0.5 m column in less than 2 s at 70 C.[ 2006-0020]Index Terms-Fast gas chromatography, LiGA, micro gas chromatograph (GC), X-ray lithography.

MEMS-based semi-packed gas chromatography columns

“…6) show a thicker coating layer and also demonstrate the pooling effect at the bottom corners of these rectangular columns. It should be noted that the pooling effect has been reported by other groups in open rectangular MEMS columns as well [5,26,27]. It is very challenging to coat MEMS-based columns with a uniform stationary phase using traditional static and dynamic techniques given that these methods were developed for capillary tubing.…”

“…The use of microelectromechanical systems (MEMS) technology to realize miniaturized GCs (GCs) has been in progress at several laboratories. The development of MEMS-based separation columns, the most critical element of the system, has been the major focus of such efforts [3][4][5][6][7][8][9][10][11]. These microfabricated columns typically have rectangular cross-sections, are open type, and are fabricated using deep reactive ion etching (DRIE) or LiGA (lithography, electroplating, and molding) techniques.…”

The Integrated Mini GC-PID System for Monitoring Air Pollution

“…However, the development of the portable GC systems was limited due to the large volume, high power consumption of traditional GC column. As MEMS technology matures, the micro GC columns [15][16][17][18][19] have a prospect future with some advantages of small size, rapid analysis, batch production, and less power consumption. The portable system integrated with micro GC columns can provide realtime monitoring for quantification and identification analysis of environmental sample.…”

High density semipacked separation columns with optimized atomic layer deposited phases

“…In this paper, the authors reported coating a 3 m-long separation column with a very thin (100 nm -200 nm) and uniform film to achieve high separation efficiency (12,500 theoretical plates). Although microseparation columns have been traditionally fabricated on a silicon wafer, Bhushan et al [6] utilized a standardized LiGA (lithography, electroplating and molding) process to fabricate high-aspect-ratio nickel columns. In this study, 2 m-long, 50 µm-wide and 300 µm-deep metal columns were sealed using electroplating and statically coated with OV-1 polymer.…”