&lt;title&gt;Metrics of resolution and performance for CD-SEMs&lt;/title&gt;

Joy, David C.; Ko, Yeong-Uk; Hwu, Justin J.

doi:10.1117/12.386444

Cited by 49 publications

(25 citation statements)

References 3 publications

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“…Although a cross-correlation function using a single or two images also provides an estimate of SNR (Frank and Al-Ali 1975, Joy et al 2000, Thong et al 2001, the signal is as same as the "image" signal. An image of the expected z value E{z}(= f ) corresponds to the denoised image, which is a by-product in the R calculation.…”

Section: Basic Concept Of the Contrast-to-gradient Methodsmentioning

confidence: 98%

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A method for personal expertise‐independent evaluation of image resolution in scanning electron microscopy

Ishitani

Sato

2002

Scanning

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Summary:The two conventional methods currently employed for the evaluation of image resolution in scanning electron microscopy are the gap method and a fast Fourier transform (FFT) method. These can be highly dependent on personal expertise on the distinction between signal information and noise contained in a micrograph. Hence, the present paper proposes an alternative method (referred to as a contrast-to-gradient (CG) method) that can determine the image resolution of a micrograph without requiring personal expertise on the judgment of noise. The image resolution in the CG method is defined as a weighted harmonic mean of the local resolution, which is proportional to the quotient of the threshold contrast divided by the local gradient. The local gradient is calculated from the quadratic function that best fits the local pixel intensities over 5 × 5 pixels. It has been shown that the CG method, compared with the FFT method, has a broader range of applications for various types of images, such as low-contrast, noise-containing, filter-processed, highly directional, and quasi-periodic feature images.

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Section: Basic Concept Of the Contrast-to-gradient Methodsmentioning

confidence: 98%

“…An emphasis is put on a potential for wide applicability of the CG method to the measurements of image resolution, not the exact beam profile. Here, all values of R(DFT) to be compared with R(CG) are calculated using our version of the Scion Image software (Scion Corp.; Joy et al 2000) (ref. Appendix A1).…”

Section: Introductionmentioning

confidence: 99%

A method for personal expertise‐independent evaluation of image resolution in scanning electron microscopy

Ishitani

Sato

2002

Scanning

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“…The correlation-based method (Frank 1980, Joy et al 2000, Youn and Egerton 1997 provides a valuable alternative to the Fourier analysis. The finite width of the autocorrelation peak reflects correlations introduced by the image-forming system, effectively approximating the autocorrelation of the PSF.…”

Section: Correlation Methodsmentioning

confidence: 99%

Experimental resolution measurement in critical dimension scanning electron microscope metrology

Lorusso

Joy

2003

Scanning

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Summary: By applying the basic principles of metrology we discuss how to define the standards that any experimental method to measure resolution has to obey. Our results clearly indicate the need to apply a calibration procedure when designing algorithms to estimate resolution to satisfy accuracy requirements. Similarly, the precision of an algorithm has to be clearly specified. We compare here the performances of a variety of commonly used implementations of published methods, with that of an algorithm based on an approach known to be reliable. Our results confirm that when an algorithm is designed with the clear intent of satisfying metrology requirements, it demonstrates excellent accuracy, precision, and lack of sensitivity to the noise level, as is desirable. As a consequence, the algorithm will have the ability to measure accurately the point spread function convoluted in the image, thus paving the way for quantitative deconvolution techniques.

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“…[9] The evaluation of the accuracy of these methods requires serial test SEM images [6,10] with varied parameters, such as structured grains and background, edge effect, blurring, vibration, and noise. Cizmar et al [10] have generated simulated SEM images for the most commonly used samples, e.g.…”

Section: Introductionmentioning

confidence: 99%

A Monte Carlo simulation study on the image resolution in scanning electron microscopy

Mao

Ding

2010

Surface & Interface Analysis

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The resolution of the scanning electron microscope limited by the beam-sample interaction is studied by Monte Carlo simulation. The simulation model is based on the full Penn algorithm for electron inelastic scattering and the associated secondary electron generation as well as on a constructive solid geometry modeling of a complex sample structure. The line-scan profiles for gold nanoparticles of different diameters on a carbon substrate are obtained in the simulation. The gap method and contrast-to-gradient (C-G) method performed for two separated particles of the same size and different sizes are considered to determine the resolution. Both methods are applied to the simulated images. A comparison on the obtained resolutions performed for the different sample topographies shows that the gap resolution depends excessively on the topography by the shading effect and gap method underestimates the influence of probe size, while C-G method overestimates this influence.

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<title>Metrics of resolution and performance for CD-SEMs</title>

Cited by 49 publications

References 3 publications

A method for personal expertise‐independent evaluation of image resolution in scanning electron microscopy

A method for personal expertise‐independent evaluation of image resolution in scanning electron microscopy

Experimental resolution measurement in critical dimension scanning electron microscope metrology

A Monte Carlo simulation study on the image resolution in scanning electron microscopy

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