2001
DOI: 10.1117/12.443109
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<title>Magnetically actuated microshutter arrays</title>

Abstract: Two-dimensional microshutter arrays are being developed at NASA Goddard Space Flight Center (GSFC) for the Next Generation Space Telescope (NGST) for use in the near-infrared region. Functioning as focal plane object selection devices, the microshutter arrays are 2-D programmable masks with high efficiency and high contrast. The NGST environment requires cryogenic operation at 45 K. Arrays are close-packed silicon nitride membranes with a unit cell size of 100x100 micrometer. Individual shutters are patterned … Show more

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Cited by 10 publications
(6 citation statements)
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“…It involves magnetic actuation and electrostatic latching and addressing. 13,14 The shutters are coated with a high permeability soft magnetic material CoFe (∼ 90%Fe and 10% Co). CoFe is a soft magnetic material with low residual magnetization.…”
Section: Microshutter Array Design and Principles Of Operationmentioning
confidence: 99%
“…It involves magnetic actuation and electrostatic latching and addressing. 13,14 The shutters are coated with a high permeability soft magnetic material CoFe (∼ 90%Fe and 10% Co). CoFe is a soft magnetic material with low residual magnetization.…”
Section: Microshutter Array Design and Principles Of Operationmentioning
confidence: 99%
“…Individual shutters are designed with a torsion flexure hinge and are magnetically actuated by scanning a permanent tripole magnet across the MSA and electrostatically held open to allow the high-contrast transmission of light from specific celestial objects into NIRSpec. The selective nature of the MSA is achieved electrostatically via a threevoltage level, cross-point addressing scheme operating on orthogonally oriented column and row electrodes driven by external electronics [4,5].…”
Section: Microshutter Array Designmentioning
confidence: 99%
“…By changing the satellite's emissivity, the heat radiated into space can be controlled. , and a magnetically actuated shutter 15 .…”
Section: Mems In Satellite Thermal Controlmentioning
confidence: 99%