2005
DOI: 10.1088/0960-1317/15/8/031
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Cryogenic characterization and testing of magnetically-actuated microshutter arrays for the James Webb Space Telescope

Abstract: Two-dimensional MEMS microshutter arrays (MSA) have been fabricated at the NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST) to enable cryogenic (-35 K) spectrographic astronomy measurements in the nearinfrared region. Functioning as a focal plane object selection device, the MSA is a 2-D programmable aperture mask with fine resolution, high efficiency and high contrast. The MSA are closepacked silicon nitride shutters (cell size of 100 x 200 pm) patterned with a torsion flex… Show more

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Cited by 9 publications
(2 citation statements)
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“…Once the material achieves a temperature of 50 K, the lattice reduction rate slows down and fracture frequency stops. 22 Thermal stress-induced fractures render cryopreserved frozen tissue unusable for transplantation. 23 Rewarming of such frozen tissue with fractures results in bleeding and medical complications during the cryosurgery.…”
Section: Fracturing Of Solids When Lowering the Temperaturementioning
confidence: 99%
“…Once the material achieves a temperature of 50 K, the lattice reduction rate slows down and fracture frequency stops. 22 Thermal stress-induced fractures render cryopreserved frozen tissue unusable for transplantation. 23 Rewarming of such frozen tissue with fractures results in bleeding and medical complications during the cryosurgery.…”
Section: Fracturing Of Solids When Lowering the Temperaturementioning
confidence: 99%
“…Tests of arrays fabricated during the process development have been obtained which suggest that significant infant mortality of shutters may occur. 16 To assess the actual performance of the shutter arrays we have designed and built a microshutter functional and optical test facility. This facility allows to subject the arrays to repeated actuation and latching process at accelerated rate.…”
Section: Microshutter Array Performancementioning
confidence: 99%