&lt;title&gt;Lucent Microstar micromirror array technology for large optical crossconnects&lt;/title&gt;

Aksyuk, Vladimir A.; Pardo, F.; Bolle, C.; Arney, S.; Giles, C.R.; Bishop, David J.

doi:10.1117/12.396503

Cited by 77 publications

(37 citation statements)

References 5 publications

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“…A variety of switches have been developed, based on arrays of pop-up mirrors [56], [57] and single-axis [58], [59] and dual-axis [60] torsion mirrors. Of these, the best known is the Lucent Wavestar (Wavestar is a trademark of Lucent Technologies) micromirror, which uses a self-assembled, linked mechanism to space the mirrors away from the substrate and hence allow a large turn angle [61].…”

Section: -D Structuresmentioning

confidence: 99%

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Syms¹,

Yeatman²,

Bright

et al. 2003

J. Microelectromech. Syst.

321

238

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Abstract-Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for accurately determining the assembled shape are discussed, and the limits on accuracy and structural distortion are considered. Applications in optics, electronics and mechanics are described. More complex operations (including the combination of self-assembly and self-organization) are also reviewed.[926]Index Terms-Capillary force, microelectromechanical systems (MEMS), microsystems, microoptoelectromechanical systems (MOEMS), self-assembly, surface tension.

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Section: -D Structuresmentioning

confidence: 99%

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Syms¹,

Yeatman²,

Bright

et al. 2003

J. Microelectromech. Syst.

321

238

View full text Add to dashboard Cite

show abstract

“…[10] Lucent Technologies has used a self-assembly technique that is driven by the residual stress in deposited thin films (Cr/Au on polysilicon) to raise two-axis polysilicon scanners (500 µm mirror diameter) to a fixed position 50 µm above the substrate. [11,12] The FREE-SPACE OPTICAL MEMS, WU, PATTERSON [13] Two-axis scanning is achieved by electrostatic force between the mirror and the quadrant electrodes on the substrate. Fan's scanner has a static optical scan range of 28°and a drive voltage of 70 V. Resonant frequency for the mirror was measured at 1.5 kHz.…”

Section: Scanners With Electrostatic Parallel-plate Actuatorsmentioning

confidence: 99%

Free-Space Optical MEMS

Wu¹,

Patterson²

2006

Mems

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“…Shortcomings of many existing approaches are the requirements of additional fabrication processes and actuators, the complicated process and the consumption of wafer area are the major limitations. To avoid the additional processes or actuators, the residual stress inherent in the thin film materials during fabrication has been exploited in [4] to construct the 3D devices.…”

Section: Introductionmentioning

confidence: 99%

A robust and reliable stress-induced self-assembly supporting mechanism for optical devices

Lin

et al. 2005

Microsystem Technologies

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The stress-induced supporting mechanism consisting of stress-induced bending beams and novel locking component used to assemble the micromachined optical devices has been realized. The tip deflection of the stress-induced bending beams has been exploited to lift up the micromachined devices. Based on the MUMPs platform, this study has successfully established an improved surface micromachining process (MUMPs-like process) to enhance the reliability of the stress-induced beams. According to the reliability test, the variation of the tip displacement is <<1% and the variation of curvature is <<<<1% after six months. Several tests relied on the BellCore standard are also achieved, the results reveal the reliability of dielectric film is much better than the metal film. Moreover, a novel locking component was also developed to accurately position the optical component and to prevent it from deviation as well. Experimental results elaborated the feasibility and stability of the novel locking component. With improved stress-induced beam and stronger locking component, the robust and reliable stress-induced self-assembly supporting mechanism for optical devices becomes available. To demonstrate the applications of the proposed mechanism, two optical devices were accomplished in this study as well. IntroductionMUMPs (Multi-User MEMS process) is regarded as one of the most important fabrication platform for micromachined devices. Origins from the planar integrated circuit process, surface micro-machining technology can be more delicate in planar process than the bulk micro-machining or HARM (high-aspect ratio micromachining) technology. However, due to the nature of surface micro-machining process, a fundamental problem is its inability to produce highly 3D structures hence the applications are limited. To accomplish 3D devices after the process, residual stress of thin film, magnetic force [1], ultrasonic wave [2], photoresist [3], or solder reflow are widely adopted to be the selfassembly approaches. Shortcomings of many existing approaches are the requirements of additional fabrication processes and actuators, the complicated process and the consumption of wafer area are the major limitations. To avoid the additional processes or actuators, the residual stress inherent in the thin film materials during fabrication has been exploited in [4] to construct the 3D devices.Moreover, the applications of the MUMPs devices are limited by the small gap between the surface micromachined structure and the substrate which is defined by the sacrificial layer. Presently, various assembly mechanisms have been exploited to extend the actuation range of optical surface micromachined devices. For instance, a cantilever bent by the residual stresses of Metal/Poly-Si films is employed in [5] to lift up the mirror of a 2D switch. The height of the mirror is determined by the length as well as the bending curvature of the cantilever. In addition, the bent cantilever is also acting as a spring during actuation. In [6], Lucent Technology has d...

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<title>Lucent Microstar micromirror array technology for large optical crossconnects</title>

Cited by 77 publications

References 5 publications

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Free-Space Optical MEMS

A robust and reliable stress-induced self-assembly supporting mechanism for optical devices

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