&lt;title&gt;Integrated force array: positioning drive applications&lt;/title&gt;

Bobbio, Stephen M.; Goodwin-Johansson, Scott H.; Dubois, Thomas; Tranjan, Farid M.; Smith, Stephen W.; Fair, Richard B.; Ball, Christian; Jacobson, James; Bartlett, Charles; Eleyan, Nadeem; Makki, Hussein; Gupta, Rupali

doi:10.1117/12.240436

Cited by 4 publications

(1 citation statement)

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“…IFAs have been described in previous publications [1][2][3][4]. These devices are patterned on 2.2 µm thick polyimide films using standard integrated circuit photolithography.…”

Section: The Integrated Force Array (Ifa)mentioning

confidence: 99%

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

et al. 2001

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There is much interest in the biomedical community in mechanically steering both high frequency ultrasound transducers and various optical beams. We are currently investigating the use of two different types of MEMS actuators, integrated force arrays (IFAs) and spiral wound transducers (SWTs). The IFA is a linear actuator that is a parallel network of hundreds of thousands of flexible capacitors that electrostatically contract, and the SWT is a patterned tape that is wound to form a circular network of flexible capacitors that can be electrostatically compressed to tilt desired structures. Using ANSYS finite element analysis, we have developed tilting polyimide support structures, which are fabricated on silicon wafers. High frequency ultrasound transducers (20-30 MHz) have been built on these structures and IFAs used to tilt them to steer the ultrasound beam in fluids. Prototype structures have produced 20 degree sector scans scanning at frequencies up to 30 Hz. IFAs have also been used along with similar support structures to steer optical laser beams up to 45 degrees at frequencies up to 60 Hz. The SWT is a more recent development that operates with much greater force than the IFA that could steer ultrasound and optical beams for similar applications.

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“…IFAs have been described in previous publications [1][2][3][4]. These devices are patterned on 2.2 µm thick polyimide films using standard integrated circuit photolithography.…”

Section: The Integrated Force Array (Ifa)mentioning

confidence: 99%

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

et al. 2001

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Sensor and actuator considerations for precision, small machines

Smith

Seugling

2006

Precision Engineering

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Intracardiac ultrasound scanner using a micromachine (MEMS) actuator

Zara

Bobbio

Goodwin-Johansson

et al. 2000

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Catheter-based intracardiac ultrasound offers the potential for improved guidance of interventional cardiac procedures. The objective of this research is the development of catheter-based mechanical sector scanners incorporating high frequency ultrasound transducers operating at frequencies up to 20 MHz. The authors' current transducer assembly consists of a single 1.75 mm by 1.75 mm, 20 MHz, PZT element mounted on a 2 mm by 2 mm square, 75 mum thick polyimide table that pivots on 3-mum thick gold plated polyimide hinges. The hinges also serve as the electrical connections to the transducer. This table-mounted transducer is tilted using a miniature linear actuator to produce a sector scan. This linear actuator is an integrated force array (IFA), which is an example of a micromachine, i.e., a microelectromechanical system (MEMS). The IFA is a thin (2.2 mum) polyimide membrane, which consists of a network of hundreds of thousands of micron scale deformable capacitors made from pairs of metallized polyimide plates. IFAs contract with an applied voltage of 30-120 V and have been shown to produce strains as large as 20% and forces of up to 8 dynes. The prototype transducer and actuator assembly was fabricated and interfaced with a GagePCI analog to digital conversion board digitizing 12 bit samples at a rate of 100 MSamples/second housed in a personal computer to create a single channel ultrasound scanner. The deflection of the table transducer in a low viscosity insulating fluid (HFE 7100, 3M) is up to +/-10 degrees at scan rates of 10-60 Hz. Software has been developed to produce real-time sector scans on the PC monitor.

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<title>Integrated force array: positioning drive applications</title>

Cited by 4 publications

References 0 publications

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

Sensor and actuator considerations for precision, small machines

Intracardiac ultrasound scanner using a micromachine (MEMS) actuator

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