<title>Hybrid MOEMS approaches for fiber optic switches and switch matrices</title>

Abstract

We have developed a novel concept for miniaturized fiber optic switches. It is based on microprisms moved into the path of one or several input beams which are deflected hereby and directed to the output fibers. Coupling of the deflected light beams into the output fibers is achieved by microlens arrays. The overall optical system has been designed properly in order to minimize the switch dimensions and to obtain excellent optical parameters of the switches.Piezoelectric bending actuators with a characteristic translation range of > 0.5 mm have been used for the microprism movement. First switch prototypes are characterized by excellent optical parameters (insertion loss of 1.5 dB, crosstalk < -70 dB) and short switching time (2 ms). Several methods for system integration have been developed and applied to prototype fabrication. The first important process is the integration of fiber arrays with microlens arrays. A special mounting procedure has been developed for this. The second critical integration process is the mounting procedure of the prisms to the bending actuators. For this purpose a special vacuum gripper has been built. With the help ofthis gripper all microprisms can be mounted in one step.