&lt;title&gt;High-temperature high-bandwidth fiber optic MEMS pressure-sensor technology for turbine engine component testing&lt;/title&gt;

Pulliam, Wade J.; Russler, Patrick M.; Fielder, Robert S.

doi:10.1117/12.456079

Cited by 48 publications

(24 citation statements)

References 6 publications

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“…With the evaluated temperature, the alumina ceramic relative permittivity increased, thus increasing the C s , while inductance L s merely changed due to the low coefficient of thermal expansion of alumina ceramic. Therefore, the resonant frequency of the sensor changed accordingly with the temperature according to (1). The inductive-capacitive resonance circuit was formed by the silver conductor.…”

Section: Measurement and Discussionmentioning

confidence: 99%

“…Pressure signal acquisition has been greatly demanded in harsh environment, featuring turbine engine design, and petroleum exploration, whereas all of them require the sensor capable of operating at more than 200 ℃ [1][2][3]. Existing sensors are able to meet the requirements in the measuring range, frequency response, and accuracy, while they can only play roles in some of "moderate" environments [4,5].…”

Section: Introductionmentioning

confidence: 99%

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Alumina ceramic based high-temperature performance of wireless passive pressure sensor

Wang

Guo

et al. 2016

Photonic Sens

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Abstract:A wireless passive pressure sensor equivalent to inductive-capacitive (LC) resonance circuit and based on alumina ceramic is fabricated by using high temperature sintering ceramic and post-fire metallization processes. Cylindrical copper spiral reader antenna and insulation layer are designed to realize the wireless measurement for the sensor in high temperature environment. The high temperature performance of the sensor is analyzed and discussed by studying the phase-frequency and amplitude-frequency characteristics of reader antenna. The average frequency change of sensor is 0.68 kHz/℃ when the temperature changes from 27℃ to 700℃ and the relative change of twice measurements is 2.12%, with high characteristic of repeatability. The study of temperature-drift characteristic of pressure sensor in high temperature environment lays a good basis for the temperature compensation methods and insures the pressure signal readout accurately.

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Section: Measurement and Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Alumina ceramic based high-temperature performance of wireless passive pressure sensor

Wang

Guo

et al. 2016

Photonic Sens

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“…This is usually guaranteed due to the specific mounting conditions and available cooling in power generating gas turbines. Alternative applications of this sensor type could include performance evaluation and control of propulsion systems 21 .…”

Section: High-temperature Dynamic Pressure Sensormentioning

confidence: 99%

Fiber optical sensors for aircraft applications

Pechstedt

2014

SPIE Proceedings

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In this paper selected fiber optical point sensors that are of potential interest for deployment in aircraft are discussed. The operating principles together with recent measurement results are described. Examples include a high-temperature combined pressure and temperature sensor for engine health, hydraulics and landing gear monitoring, an ultra-high sensitive pressure sensor for oil, pneumatic and fluid aero systems applications and a combined acceleration and temperature sensor for condition monitoring of rotating components.

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“…But very little data has been reported for optical pressure measurement with high-temperature-capability crystals. Recently, Pulliam et al 10 developed a high-temperature fiber optic MEMS pressure sensor that combines a SiC diaphragm, a sapphire waveguide, and an optical fiber. But this sensor was only tested up to 600°C and 210 psi.…”

Section: Introductionmentioning

confidence: 99%

High-temperature fiber optic cubic-zirconia pressure sensor

2005

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There is a critical need for pressure sensors that can operate reliably at high temperatures in many industrial segments such as in the combustion section of gas turbine engines for both transportation and power generation, coal gasifiers, coal fired boilers, etc. Optical-based sensors are particularly attractive for the measurement of a wide variety of physical and chemical parameters in high-temperature and highpressure industrial environments due to their small size and immunity to electromagnetic interference. A fiber optic pressure sensor utilizing single-crystal cubic zirconia as the sensing element is reported. The pressure response of this sensor has been measured at temperatures up to 1000°C. Additional experimental results show that cubic zirconia could be used for pressure sensing at temperatures over 1000°C. This study demonstrates the feasibility of using a novel cubic-zirconia sensor for pressure measurement at high temperatures. © 2005 Society of PhotoOptical Instrumentation Engineers.

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<title>High-temperature high-bandwidth fiber optic MEMS pressure-sensor technology for turbine engine component testing</title>

Cited by 48 publications

References 6 publications

Alumina ceramic based high-temperature performance of wireless passive pressure sensor

Alumina ceramic based high-temperature performance of wireless passive pressure sensor

Fiber optical sensors for aircraft applications

High-temperature fiber optic cubic-zirconia pressure sensor

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