&lt;title&gt;Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion-assisted sputter deposition&lt;/title&gt;

Eriksson, Fredrik; Johansson, Göran A.; Hertz, Hans M.; Birch, Jens

doi:10.1117/12.450948

Cited by 4 publications

(2 citation statements)

References 17 publications

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“…ScN thin films were grown on one-side-polished sapphire Al 2 O 3 (0001) (dimensions 10 × 10 × 0.5 mm 3 ) by reactive dc magnetron sputtering in a high-vacuum chamber with a base pressure of 2.7 × 10 −5 Pa. The system is described in detail elsewhere [39]. The Sc target was a 7.62-cm-diameter disk shape, with 99.95% purity with fluorine as a common impurity.…”

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Phonon thermal conductivity of scandium nitride for thermoelectrics from first-principles calculations and thin-film growth

et al. 2017

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The knowledge of lattice thermal conductivity of materials under realistic conditions is vitally important since many modern technologies require either high or low thermal conductivity. Here, we propose a theoretical model for determining lattice thermal conductivity, which takes into account the effect of microstructure. It is based on ab initio description that includes the temperature dependence of the interatomic force constants and treats anharmonic lattice vibrations. We choose ScN as a model system, comparing the computational predictions to the experimental data by time-domain thermoreflectance. Our experimental results show a trend of reduction in lattice thermal conductivity with decreasing domain size predicted by the theoretical model. These results suggest a possibility to control thermal conductivity by microstructural tailoring and provide a predictive tool for the effect of the microstructure on the lattice thermal conductivity of materials based on ab initio calculations. DOI: 10.1103/PhysRevB.96.195417 Design of modern materials inevitably requires taking the thermal conductivity into account [1]. For thermoelectric materials a low thermal conductivity is crucial to avoid heat transfer across the legs and therefore loss in energy conversion efficiency [2]. In contrast, electronic components require packaging materials with high thermal conductivity to efficiently dissipate the generated heat [3]. Furthermore, the more complex the devices become, the higher is the demand to control the interplay between microstructure and thermal performance [4,5]. For hard protective wear-resistant coatings, in, e.g., cutting or milling applications, thermal properties are often barely considered when optimizing mechanical and tribological properties, despite the fact that the workpiece is typically subject to temperatures locally exceeding 1100• C in the contact spots [6][7][8]. The requirements for thermal conductivity are therefore high: the in-plane heat spread within the coating should be as high as possible to ensure uniform heating, while the cross-plane thermal conductivity should be as low as possible to minimize the heat load on the substrate [6][7][8].These examples underscore how important it is to understand and be able to tailor thermal conductivity in materials in a broad range of applications.Measurements of thermal conductivity are relatively standard for bulk materials but much more challenging for thin films and nanoscale materials, still being the topic of active method development [9,10]. There is therefore a substantial need to also develop theoretical methods for predicting or simulating the thermal conductivity of real materials. Recent advances in methodology allow us to predict the thermal * Present address: Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180, USA.† Corresponding author: per.eklund@liu.se conductivity from first principles. In the present paper, we combine state-of-the-art computational techniques with characteriz...

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Phonon thermal conductivity of scandium nitride for thermoelectrics from first-principles calculations and thin-film growth

et al. 2017

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“…Their optical performance is even more strongly influenced by the interface quality because the single layer thicknesses are in the atomic range of about one nanometer. Cr/Sc is the most promising material combination for application in the "water window" due to its good growth properties [13][14][15][16][17][18] .…”

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confidence: 99%

At-wavelength metrology on Sc-based multilayers for the UV and water window

Schaefers¹,

Yulin

Feigl

et al. 2003

SPIE Proceedings

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Due to the unusual behaviour of its optical constants the first transition element Sc with atomic configuration (3p 6 4s 2 3d) is a very attractive candidate for multilayer coatings optimised for the anomalous dispersion region of the 3p-3d transition around 28 eV (45 nm) and for the vicinity of the 2p absorption edge at 398 eV (3.12 nm), respectively. New normal incidence reflectivity data for Sc/Si at Sc 3p are shown with peak values up to 54 % and for Cr/Sc at Sc 2p with peak values up to 17 % are presented. The influence of optical performance on multilayer growth conditions and parameters are discussed in detail and the necessity of at-wavelength metrology for the final characterisation is demonstrated. The results encourage e.g. applications for normal incidence optics used for highpower pulsed UV and x-ray laser systems and for x-ray microscopes operated in the water window.

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Design and performance of a laser-plasma-based compact soft x-ray microscope

Johansson

Holmberg

Hertz

et al. 2002

Review of Scientific Instruments

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We describe the design of a user-friendly compact water-window x-ray microscope. The microscope is based on a ϭ3.37 nm liquid-jet-target laser-plasma source in combination with a normal-incidence multilayer condenser mirror and high-resolution diffractive optics for the imaging. With its high mechanical and thermal stability, the instrument demonstrates enhanced resolution and potential for compact x-ray imaging with the quality of synchrotron-based microscopes. Furthermore, a new sample handling system, computer control, and other improvements facilitate application-oriented x-ray microscopy outside the synchrotron laboratory.

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<title>Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion-assisted sputter deposition</title>

Cited by 4 publications

References 17 publications

Phonon thermal conductivity of scandium nitride for thermoelectrics from first-principles calculations and thin-film growth

Phonon thermal conductivity of scandium nitride for thermoelectrics from first-principles calculations and thin-film growth

At-wavelength metrology on Sc-based multilayers for the UV and water window

Design and performance of a laser-plasma-based compact soft x-ray microscope

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