&lt;title&gt;Application of Ritchey-Common test in large flat measurements&lt;/title&gt;

Han, Sen; Novak, Erik; Schurig, Mike

doi:10.1117/12.445584

Cited by 18 publications

(12 citation statements)

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“…From Han's mathematical description [2], one can see that the grazing incidence test is a special case of the Ritchey-Common test, where the incidence beam is collimated instead of diverging. In other words, the diverging beam is replaced by a collimated beam; usually the incidence angle is also greatly increased to achieve good results on rough samples.…”

Section: Error Analysismentioning

confidence: 99%

“…Han's paper [2], one can find the relationship between the surface error and the wave front deviation as follows. …”

Section: Error Analysismentioning

confidence: 99%

“…Second, the rough surface is rotated about its center in user-defined increments, such as 15 or 30 degrees. Mathematically, the grazing incidence method may be thought as a special case of the Ritchey-Common test as shown in Figure 1 [2], where the incidence beam is collimated instead of divergent, a return sphere is replaced by a return flat and the incidence angle is greatly increased.…”

Section: Introductionmentioning

confidence: 99%

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Application of grazing incidence interferometer to rough surface measurement

2003

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In practical grazing incidence measurements using a commercial interferometer, repeatability and accuracy suffer from several effects related to part placement. In this paper, the authors analyzed three primary error resources in grazing incidence interferometry: incidence angle error, rotation angle error and included angle. The mathematical foundations of these errors as well as measurement results of several samples are presented showing the effects of each of these errors on. Using the test procedures described in the paper, the errors can be greatly reduced and the repeatability and accuracy increased by 20%.

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Section: Error Analysismentioning

confidence: 99%

“…Han's paper [2], one can find the relationship between the surface error and the wave front deviation as follows. …”

Section: Error Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Application of grazing incidence interferometer to rough surface measurement

2003

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“…Power, a common error for large flat, appears as both power and astigmatism in testing wavefront. They can be expressed by [5] …”

Section: Ritchey-common Testingmentioning

confidence: 99%

Interferometer alignment

Han

2007

SPIE Proceedings

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For all of the interferometers, alignment has played a key role in manufacturing them. Alignment goals are reproducible results across systems, easy to use and understand, altering overall mechanical design as little as possible, using the loosest tolerances required to achieve results. This paper describes four typical interferometers and their alignments. They are 1.06um interferometer, 24" large aperture phase shifting interferometer, Ritchey-Common testing and microscope interferometer as well.

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“…Whether the Ritchey-Common test or large aperture interferometry is used, a reference optical element with an aperture equal to or larger than the measured ones is required. 11,12 However, large reference optics is hard to manufacture and is very expensive. The basic principle of the subaperture stitching technique is synthesizing a full-aperture phase map from multiple subaperture phase shapes with motion capability and a stitching algorithm.…”

Section: Introductionmentioning

confidence: 99%

Sparse subaperture stitching method for measuring large aperture planar optics

Shen

Tong

et al. 2016

Opt. Eng

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Abstract. Ring polishing is a primary method to polish large aperture planar optics that is widely used in the fabrication of high-power solid-state laser equipment. The relative motion track with the ring polishing is always rotationally symmetrical and the amount of material removal is related to the radius. The height errors are identical when the points are in the same radius, which can largely reduce the coverage area when the subaperture stitching method is used to measure the figure error of the surface. A new sparse lattice for planar optics polished by ring polishing is introduced. The cumulative error is proven small enough for sparse subaperture stitching by the reference of the simulated data. A planar optical element with 200 mm × 200 mm aperture was chosen to test the feasibility of our proposed method. The results indicate that sparse stitching is suitable for measuring a large planar surface polished by ring polishing. The results of two chain lattice are closer to the fully covered lattice than a one chain lattice. However, more measuring time could be saved by the one chain lattice method. So, the usage of different lattices could be adapted for different periods of large aperture planar optical manufacturing. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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<title>Application of Ritchey-Common test in large flat measurements</title>

Cited by 18 publications

References 0 publications

Application of grazing incidence interferometer to rough surface measurement

Application of grazing incidence interferometer to rough surface measurement

Interferometer alignment

Sparse subaperture stitching method for measuring large aperture planar optics

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