Application of grazing incidence interferometer to rough surface measurement

Han, Sen; Novak, Erik; Sullivan, Joseph

doi:10.1117/12.500108

Cited by 7 publications

(2 citation statements)

References 3 publications

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“…If the large-aperture space telescope is subjected to high-precision, high-efficiency, and low-cost self-aligned detection, it can be considered to break through the aperture limitation of the traditional single-plane mirror and increase the equivalent aperture of the plane mirror by using the method of submirror segmentation. At present, the grazing incidence interferometric detection method of a single-plane mirror is mature, and the detection method has reached high accuracy [2][3][4]. However, the use of this method to complete the detection of large-aperture segmented plane mirrors is still a difficult problem, not only because large-aperture segmented plane mirrors are less widely used (to overcome the technical bottleneck of a traditional singleplane mirror with a diameter of less than 8m), but also because piston errors in segmented plane mirrors are more difficult to detect than in single-plane mirrors.…”

Section: Introductionmentioning

confidence: 99%

Investigation into the Co-Phase Detection Methodology for Segmented Plane Mirrors Utilizing Grazing Incidence Interferometry

Liu,

Guo,

2024

Sensors

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Segmented plane mirrors constitute a crucial component in the self-aligned detection process for large-aperture space optical imaging systems. Surface shape errors inherent in segmented plane mirrors primarily manifest as tilt errors and piston errors between sub-mirrors. While the detection and adjustment techniques for tilt errors are well-established, addressing piston errors poses a more formidable challenge. This study introduces a novel approach to achieve long-range, high-precision, and efficient co-phase detection of segmented plane mirrors by proposing a segmented plane mirror shape detection method based on grazing incidence interferometry. This method serves to broaden the detection range of piston errors, mitigate the issue of the 2π ambiguity resulting from piston errors in co-phase detection, and extend the detection capabilities of the interferometer. By manipulating the incident angle of the interferometer, both rough and precise adjustments of the segmented plane mirrors can be effectively executed.

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Section: Introductionmentioning

confidence: 99%

Investigation into the Co-Phase Detection Methodology for Segmented Plane Mirrors Utilizing Grazing Incidence Interferometry

Liu,

Guo,

2024

Sensors

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“…The Skip-Flat test, which uses a flat mirror as the reflective element, is a variation of the Ritchey-Common configuration [13,14]. This test uses an interferometer with a collimated output that is much smaller than the test surface.…”

Section: Introductionmentioning

confidence: 99%

Absolute surface metrology by rotational averaging in oblique incidence interferometry

Lin

Song

et al. 2014

Appl. Opt.

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A modified method for measuring the absolute figure of a large optical flat surface in synchrotron radiation by a small aperture interferometer is presented. The method consists of two procedures: the first step is oblique incidence measurement; the second is multiple rotating measurements. This simple method is described in terms of functions that are symmetric or antisymmetric with respect to reflections at the vertical axis. Absolute deviations of a large flat surface could be obtained when mirror antisymmetric errors are removed by N-position rotational averaging. Formulas are derived for measuring the absolute surface errors of a rectangle flat, and experiments on high-accuracy rectangle flats are performed to verify the method. Finally, uncertainty analysis is carried out in detail.

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