&lt;title&gt;3D line-scan imaging with orthogonal symmetry&lt;/title&gt;

Svetkoff, Donald J.; Kilgus, Donald B.T.; Boman, R.

doi:10.1117/12.230377

Cited by 2 publications

(2 citation statements)

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“…As a result, surface profile measurement has become an important issue in industrial inspection processes to reduce the defect rate and to fulfill the consumers’ demand. Many nondestructive three-dimensional (3D) surface profiling techniques have been developed to monitor product quality and to improve process efficiency [1,2,3,4]. Furthermore, different optical inspection methods have been proposed for 3D surface profile imaging with cost-effective, nondestructive, noncontact, high-speed, and high-accuracy solutions [5,6,7,8,9].…”

Section: Introductionmentioning

confidence: 99%

Full-Field Optical Coherence Tomography Using Galvo Filter-Based Wavelength Swept Laser

Shirazi

Kim

Jeon

et al. 2016

Sensors

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We report a wavelength swept laser-based full-field optical coherence tomography for measuring the surfaces and thicknesses of refractive and reflective samples. The system consists of a galvo filter–based wavelength swept laser and a simple Michelson interferometer. Combinations of the reflective and refractive samples are used to demonstrate the performance of the system. By synchronizing the camera with the source, the cross-sectional information of the samples can be seen after each sweep of the swept source. This system can be effective for the thickness measurement of optical thin films as well as for the depth investigation of samples in industrial applications. A resolution target with a glass cover slip and a step height standard target are imaged, showing the cross-sectional and topographical information of the samples.

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Section: Introductionmentioning

confidence: 99%

Full-Field Optical Coherence Tomography Using Galvo Filter-Based Wavelength Swept Laser

Shirazi

Kim

Jeon

et al. 2016

Sensors

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“…Concomitant with the rapid growth of the precision components industry, surface profile measurement has become increasingly important in industrial inspection processes and many nondestructive three-dimensional (3D) surface profiling techniques [ 1 , 2 , 3 , 4 ] have been developed for product quality control and process efficiency. Further, as demand for cost-effective, noncontact, high-speed, high-accuracy 3D surface profiling technology is on the rise, various optical approaches to 3D surface profile imaging have been widely suggested [ 5 , 6 , 7 , 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

Parallel Imaging of 3D Surface Profile with Space-Division Multiplexing

Lee

Cho

Kim

et al. 2016

Sensors

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We have developed a modified optical frequency domain imaging (OFDI) system that performs parallel imaging of three-dimensional (3D) surface profiles by using the space division multiplexing (SDM) method with dual-area swept sourced beams. We have also demonstrated that 3D surface information for two different areas could be well obtained in a same time with only one camera by our method. In this study, double field of views (FOVs) of 11.16 mm × 5.92 mm were achieved within 0.5 s. Height range for each FOV was 460 µm and axial and transverse resolutions were 3.6 and 5.52 µm, respectively.

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<title>3D line-scan imaging with orthogonal symmetry</title>

Cited by 2 publications

References 0 publications

Full-Field Optical Coherence Tomography Using Galvo Filter-Based Wavelength Swept Laser

Full-Field Optical Coherence Tomography Using Galvo Filter-Based Wavelength Swept Laser

Parallel Imaging of 3D Surface Profile with Space-Division Multiplexing

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