Boron-substituted carbon powder, B x C 1−x with x up to 0.17, has been successfully synthesized by hot filament chemical vapor deposition. The boron concentration in prepared B x C 1−x samples can be controlled by varying the relative proportions of methane and diborane. X-ray diffraction, transmission electron microscopy, and electron energy loss spectrum confirm the successful synthesis of an amorphous BC 5 compound, which consists of 10-20 nm particles with disk-like morphology. Thermogravimetry measurement shows that BC 5 compound starts to oxidize approximately at 620℃ and has a higher oxidation resistance than carbon. carbon, boron, hot filament chemical vapor deposition, substitution, oxidation behavior