1996
DOI: 10.1016/0008-6223(96)00075-9
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LPCVD and characterization of boron-containing pyrocarbon materials

Abstract: Pyrocarbon materials containing various amounts of boron have been prepared by LPCVD from BCl 3 -C 3 H 8 -H 2 precursor mixtures. The growth rate is increased with respect to pure pyrocarbon deposition. By increasing BCl 3 / (C 3 H 8 + BCl 3 ) ratio up to 85%, the incorporation of boron can reach 33 at.%. A small amount of boron (e.g. 8 at.%) highly enhances the anisotropy of pyrocarbon, as evidenced by optical microscopy, X-ray diffraction and transmission electron microscopy (selected area diffraction and la… Show more

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Cited by 144 publications
(80 citation statements)
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“…By fitting the B 1s XPS spectrum, the proportions of B 1s components with different types of chemical states are achieved, as listed in Table 2. The components at 187.8 and 188.9 eV can be associated with a boron carbide such as B 4 C and a boron atom included by substitution in the graphitic structure, as proposed by William et al [12] and Jacques et al [13]. The high energy components at 190.…”
Section: Measurements Of the Compositementioning
confidence: 84%
“…By fitting the B 1s XPS spectrum, the proportions of B 1s components with different types of chemical states are achieved, as listed in Table 2. The components at 187.8 and 188.9 eV can be associated with a boron carbide such as B 4 C and a boron atom included by substitution in the graphitic structure, as proposed by William et al [12] and Jacques et al [13]. The high energy components at 190.…”
Section: Measurements Of the Compositementioning
confidence: 84%
“…By CVD methods, it has been found that the boron concentrations in the obtained B x C 1−x materials were mainly in the range of 15-19 at% [13][14][15] , which means the existence of one ordered BC 5 compound. As far as we know, the obtained B x C 1−x materials with high boron concentrations are amorphous or turbostratic films [12][13][14][15][16][17][18][19] . These samples with film form are difficult to explore their oxidation behavior.…”
Section: Introductionmentioning
confidence: 98%
“…Boron-substituted graphite materials, referred to as B x C 1−x (0<x<0.25), have been studied theoretically [5][6][7] and experimentally [8][9][10][11][12][13][14][15][16][17][18][19][20] . Structural and electronic properties of some ordered B x C 1−x compounds have been investigated using different calculational methods [5][6][7] .…”
Section: Introductionmentioning
confidence: 99%
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“…In research on the microstructures of pyrocarbon, the selected area electron diffraction (SAED) technique is often employed to analyze the misorientation degree and space between (002) planes (d002). The orientation angle (OA) is defined as the opening angle corresponding to the full width at half maximum (FWHM) of the intensity along the (002) ring reflection (Bourrat et al, 2000;Jacques et al, 1996). OA is an important parameter to characterize the texture of pyrocarbon.…”
Section: Introductionmentioning
confidence: 99%