Low-voltage nanodomain writing in He-implanted lithium niobate crystals

Lilienblum, Martin; Ofan, Avishai; Hoffmann, Á.; Gaathon, Ophir; Vanamurthy, Lakshmanan; Bakhru, Sasha; Bakhru, H.; Osgood, Richard M.; Soergel, E.

doi:10.1063/1.3319839

Cited by 15 publications

(6 citation statements)

References 23 publications

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“…The presence of a thin layer of ferroelectric crystal greatly simplifies the process of creating waveguide structures by Ti implantation or proton exchange methods. Moreover, the thin crystal layers of LiNbO 3 and LiTaO 3 ferroelectric crystals allow for the formation of nanoscale domain structures [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

et al. 2021

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The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO3 crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons registration mode, made it possible to visualize the SAW and PSAW in the LiNbO3/Si layered structure. The process of the SAW and PSAW propagation in a LiNbO3/Si layered structure and in a bulk 41° YX-cut of a LiNbO3 crystal were compared. It was demonstrated that the SAW velocities in the layered LiNbO3/Si structure exceed the typical SAW velocities for LiNbO3 and Si single crystals. In the layered structure, the SAW and PSAW velocities were 4062 m/s, 4731 m/s, and 5871 m/s. It was also demonstrated that the PSAW velocities are the same in the LiNbO3/Si layered structure and in the bulk 41° YX-cut of a LiNbO3 crystal.

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Section: Introductionmentioning

confidence: 99%

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

et al. 2021

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“…However, the fluences needed for good optical confinement using light ion implantation are very high, of the order of 10 16 -10 17 at/cm 2 . Interestingly, the use of buried damaged layers produced by ion implantation have been found to be good for producing easier, better and smaller domain reversal patterning in LN with nanometer sizes [16][17][18] Recently, the use of irradiations with heavier ions (i.e. A > 10) at higher energies (≥ 1 MeV/amu, also called swift heavy ions or SHI) such that the maximum electronic energy loss (or stopping power, Se) takes place some microns underneath the surface, has been proposed for fabricating good and novel optical waveguides in LiNbO 3 [19][20][21] and other oxides [22,23] with the pragmatic benefit of using fluences several orders of magnitude lower than those used with light ion implantation.…”

Section: Introductionmentioning

confidence: 99%

Low loss optical waveguides fabricated in LiTaO₃ by swift heavy ion irradiation

et al. 2019

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Optical waveguides are fabricated by irradiation of LiTaO 3 with a variety of swift heavy ions that provide increasing levels of both nuclear and electronic damage rates, including C, F and Si ions, in the energy range of 15-40 MeV. A systematic study of the role of the ion fluence has been carried out in the broad range of 1e13-2e15 at/cm 2 . The kinetics of damage is initially of nuclear origin for the lowest fluences and stopping powers and, then, is enhanced by the electronic excitation (for F and Si ions) in synergy with the nuclear damage. Applying suitable annealing treatments, optical propagation losses values as low as 0.1 dB have been achieved. The damage rates found in LiTaO 3 have been compared with those known for the reference LiNbO 3 and discussed in the context of the thermal spike model. Agreement H or He) implantation with a few MeV energy was mostly used, exploiting the structural (nuclear) damage caused by the elastic collisions at the end of the ion range. The buried damaged layer typically has lower density and lower refractive index, creating an optical Waveguide fabrication by swift ion irradiationZ-cut 1 mol% MgO doped stoichiometric LiTaO3 plates (SLT) were provided by Oxide Corporation, Japan, and Z-cut congruent LiTaO3 wafers (CLT) from Roditi Corporation. The

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“…Recently it has been shown that sub-micrometer-sized surface domains can be written in He-irradiated LiNbO 3 crystals by applying voltage pulses to the tip of a scanning probe microscope [22]. In this paper, we present a detailed analysis of this technique and in particular the dependence of the domain formation on both the pulse (voltage and duration) and the irradiation parameters (energy and fluence), hence providing a deeper understanding of the poling process.…”

Section: Introductionmentioning

confidence: 99%

Large-area regular nanodomain patterning in He-irradiated lithium niobate crystals

et al. 2011

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Large-area ferroelectric nanodomain patterns, which are desirable for nonlinear optical applications, were generated in previously He-implanted lithium niobate crystals by applying voltage pulses to the tip of a scanning force microscope. The individual nanodomains were found to be of uniform size, which depended only on the inter-domain spacing and the pulse amplitude. We explain this behavior by the electrostatic repulsion of poling-induced buried charges between adjacent domains. The domain patterns were imaged by piezoresponse force microscopy and investigated by domain-selective etching in conjunction with focused ion beam etching followed by scanning electron microscopy imaging. In order to optimize the He-irradiation parameters for easy and reliable nanodomain patterning a series of samples subjected to various irradiation fluences and energies was prepared. The different samples were characterized by investigating nanodomains generated with a wide range of pulse parameters (amplitude and duration). In addition, these experiments clarified the physical mechanism behind the facile poling measured in He-irradiated lithium niobate crystals: the damage caused by the energy loss that takes place via electronic excitations appears to act to stabilize the domains, whereas the nuclear-collision damage degrades the crystal quality, and thus impedes reliable nanodomain generation.

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Low-voltage nanodomain writing in He-implanted lithium niobate crystals

Cited by 15 publications

References 23 publications

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

Low loss optical waveguides fabricated in LiTaO₃ by swift heavy ion irradiation

Large-area regular nanodomain patterning in He-irradiated lithium niobate crystals

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Low-voltage nanodomain writing in He-implanted lithium niobate crystals

Cited by 15 publications

References 23 publications

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

Low loss optical waveguides fabricated in LiTaO3 by swift heavy ion irradiation

Large-area regular nanodomain patterning in He-irradiated lithium niobate crystals

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Low loss optical waveguides fabricated in LiTaO₃ by swift heavy ion irradiation