Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

Рощупкин, Д. В.; Емелин, Е. В.; Plotitcina, Olga; Mololkin, A. A.; Telminov, Oleg

doi:10.3390/cryst11091082

Cited by 4 publications

(4 citation statements)

References 38 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Conversely, when the thickness increases, the fluctuations are confined to the piezoelectric layer, which indicates that the thickness of the piezoelectric layer directly affects the velocity of the Rayleigh wave, which is consistent with the conclusions drawn in ref. [44]. The SAW velocity V for different types of double-layer substrate strucutre show significant differences.…”

Section: Saw Characteristics Of the Double-layer Piezoelectric Substratementioning

confidence: 95%

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Chen,

Meng,

et al. 2023

Micromachines

View full text Add to dashboard Cite

The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezoelectric substrate to form a double-layer structure significantly enhanced the SAW gyroscopic effect, and the smaller the reflection coefficient of the lower-layer material, the stronger the SAW gyroscopic effect, with values being reached that were two to three times those with single-layer substrate structures. This was confirmed using a three-dimensional model, and the experimental results also showed that the thickness of the piezoelectric layer and the type of the lower-layer material also had a significant impact on the SAW gyroscopic effect. This novel discovery will pave the way for the future development of SAW angular velocity sensors.

show abstract

Section: Saw Characteristics Of the Double-layer Piezoelectric Substratementioning

confidence: 95%

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Chen,

Meng,

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…To study the process of the SAW propagation on the surface of a piezoelectric substrate with graphene, a scanning electron microscopy method was used to visualize the SAW in real time [28][29][30]. The process of the SAW propagation in the SAW delay time line was investigated using a JEOL JSM840 SEM at an electron probe current of 1 nA and an accelerating voltage of 1 kV.…”

Section: Investigation Of Saw Propagation In Graphene Film By Scannin...mentioning

confidence: 99%

“…The SAW image is formed in the mode of recording of low-energy secondary electrons with energy of ~1 eV, which are sensitive to the piezoelectric potential that accompanies the SAW propagation on the surface of the piezoelectric substrate. To study the process of the SAW propagation on the surface of a piezoelectric substrate with graphene, a scanning electron microscopy method was used to visualize the SAW in real time [28][29][30]. The process of the SAW propagation in the SAW delay time line was investigated using a JEOL JSM840 SEM at an electron probe current of 1 nA and an accelerating voltage of 1 kV.…”

Section: Investigation Of Saw Propagation In Graphene Film By Scannin...mentioning

confidence: 99%

Acoustically Stimulated Charge Transport in Graphene Film

et al. 2022

Self Cite

View full text Add to dashboard Cite

The process of acoustically stimulated charge transport in the graphene film on the surface of the cut of a LiNbO3 crystal was investigated. It was found that the dependence of the current in the graphene film on the frequency of the surface acoustic wave (SAW) excitation repeats the amplitude-frequency response of the SAW delay time line. It is shown that increasing the SAW amplitude leads to an increase in the current in the graphene film, and the current in the graphene film depends linearly on the amplitude of the high-frequency input signal supplied to the interdigital transducer (IDT, in dB). It is demonstrated that at a positive bias potential on the graphene film, the SAW propagation allows to change the direction of the current in the graphene film by changing the amplitude of the SAW. It is also shown that in the frequency range of the amplitude-frequency response of the SAW delay time line, the current in the graphene film can vary from positive to negative values depending on the frequency. The capability to control the SAW excitation frequency or the SAW amplitude makes it possible to control the value and direction of the current in the graphene film. The SAW propagation lets to collect and transport the photo-stimulated charges in the graphene film on the crystal surface.

show abstract

“…The most promising methods for investigation of the SAW propagation process in solids are the methods of scanning electron microscopy [5][6][7][8][9] and X-ray topography and diffraction [10][11][12][13][14][15][16], that enable to visualize the acoustic waves on the crystal surface and to determine the parameters of acoustic wave propagation processes (wavelengths, acoustic wave amplitude, power flow angles, attenuation).…”

Section: Introductionmentioning

confidence: 99%

Status of X-ray Acoustooptics at the Institute of Microelectronics Technology Russian Academy of Sciences

Roshchupkin

2023

J. Phys.: Conf. Ser.

View full text Add to dashboard Cite

The electrical measurement method, scanning electron microscopy method and high-resolution X-ray diffraction method have been used to investigate the process of the surface acoustic wave (SAW) propagation in a LiNbO3 ferroelectric crystal. Measurement of the amplitude-frequency response provides information on the losses in the acoustoelectronic device during the process of the SAW propagation. The scanning electron microscopy method permits to visualize the SAW on the surface of piezoelectric crystals in the real-time mode and to observe diffraction phenomena in acoustic beam. The X-ray diffraction method is sensitive to the crystal lattice distortions by surface acoustic wave and allows determining the SAW amplitudes.

show abstract

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

Cited by 4 publications

References 38 publications

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Acoustically Stimulated Charge Transport in Graphene Film

Status of X-ray Acoustooptics at the Institute of Microelectronics Technology Russian Academy of Sciences

Contact Info

Product

Resources

About