Low voltage actuated plate for haptic applications with PZT thin-film

Casset, F.; Danel, J.S.; Chappaz, C.; Civet, Yoan; Amberg, Michel; Gorisse, M.; Dieppedale, C.; Rhun, G. Le; Basrour, Skandar; Renaux, P.; Defaÿ, E.; Devos, Arnaud; Semail, Betty; Ancey, P.; Fanget, S.

doi:10.1109/transducers.2013.6627371

Cited by 21 publications

(13 citation statements)

References 5 publications

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“…Thus, as it will be explained in Section 3 , no clamping condition is applied to the glass plate. Previous work on PZT actuated silicon plates validates this hypothesis [13] . We neglected top and bottom electrodes on both sides of the AlN layer due to their low impact on the PDA.…”

Section: Designmentioning

confidence: 55%

“…We applied 60 V to the top electrodes of the AlN actuators, whereas 0 V is applied to the bottom ones. We introduce a damping parameter of 7.10 −8 to predict the absolute PDA of our plate under 60 V. This damping parameter is coming from the comparison between PDAs measurement and post simulation on 60 × 40 and 40 × 30 mm ² haptic plates [9] . This previous calibration step of our FEM model led us to estimate the adequate damping parameter for the 110 × 65 mm ² plate study.…”

Section: Designmentioning

confidence: 99%

“…To promote the desired mode, we use piezoelectric actuators and bimorph effect. We developed Finite Element Method (FEM) models and proved the concept using thin-film PZT actuators deposited on silicon substrate [9][10] . Nevertheless, to address transparency, low temperature process was used, to deposit AlN actuators directly on transparent glass substrate [11] .…”

Section: Introductionmentioning

confidence: 99%

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4-inch transparent plates based on thin-film AlN actuators for haptic applications

et al. 2016

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Section: Designmentioning

confidence: 55%

Section: Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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4-inch transparent plates based on thin-film AlN actuators for haptic applications

et al. 2016

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“…Laser vibrometer measurements indicate that our PZT actuator design promotes the desired mode with the targeted amplitude. Haptic feedback effect was noticeable with one's fmger on our thin-film PZT demonstrators [6].…”

Section: Introductionmentioning

confidence: 85%

Characterization and post simulation of thin-film PZT actuated plates for haptic applications

Casset

Danel

Renaux

et al. 2014

2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and

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ISBN : 978-1-4799-4791-1International audienceThe tremendous development of tactile interface in many customers' applications such as Smartphone, tablet PC or touch pad leads industrials to study “haptic interfaces” or “touch screen” solutions. This technology is already used but with limitations such as high power consumption and limited feedback effect (simple vibration). PZT is a good candidate for many actuator applications due to its high piezoelectric coefficient. In particular, it can be used for haptic interfaces to create squeeze-film effect. It consists in changing the friction between the finger and a plate resonator. It provides high granularity level of haptic sensation (texture rendering), using low power consumption compared to existing solutions. We manufactured demonstrators using a generic technology. We proved the concept through electro-mechanical characterizations and haptic feedback effect was noticeable with one's finger on our thin-film PZT demonstrators. In this paper, we presented the characterization and post-simulation of PZT-actuated plates with various actuator configurations. Measurement results, in good agreement with simulation, indicate that 2 actuator columns separated by a wavelength allow obtaining the highest substrate displacement amplitudes

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“…Demonstrators were fabricated using a generic piezoelectric technology developed at CEA-LETI compatible with the fabrication of other piezoelectric MEMS like RF switches (M. Cueff et al (2010)) or haptic components (F. Casset et al (2013)). Devices were manufactured out of 200mm standard silicon wafers.…”

Section: Dla Fabricationmentioning

confidence: 99%

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

et al. 2015

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This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr 0.52 ,Ti 0.48 )O 3 (PZT) thinfilm actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8V).

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Low voltage actuated plate for haptic applications with PZT thin-film

Cited by 21 publications

References 5 publications

4-inch transparent plates based on thin-film AlN actuators for haptic applications

4-inch transparent plates based on thin-film AlN actuators for haptic applications

Characterization and post simulation of thin-film PZT actuated plates for haptic applications

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

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