2002
DOI: 10.1016/s0921-4526(02)00523-9
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Low temperature study of loss mechanisms of mechanical oscillators

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Cited by 10 publications
(6 citation statements)
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“…[15][16][17][18] Indeed, silicon structures described as having very high Q͑Ͼ100 000͒ have traditionally been macroscopic in nature, with operating frequencies in the 1 -100 KHz range, limiting their fQ product to the 10 9 -10 10 s −1 range. [15][16][17] On the other hand, silicon devices of dimensions similar to those presented here have been known to exhibit surface-mediated issues impairing their performance, limiting their fQ product to the mid-10 10 s −1 range, even following extensive surface conditioning. 18 We believe that introduction of marginal tensile stress improves confinement of energy in the device by mitigating mechanical coupling with the clamping points.…”
Section: Resultsmentioning
confidence: 99%
“…[15][16][17][18] Indeed, silicon structures described as having very high Q͑Ͼ100 000͒ have traditionally been macroscopic in nature, with operating frequencies in the 1 -100 KHz range, limiting their fQ product to the 10 9 -10 10 s −1 range. [15][16][17] On the other hand, silicon devices of dimensions similar to those presented here have been known to exhibit surface-mediated issues impairing their performance, limiting their fQ product to the mid-10 10 s −1 range, even following extensive surface conditioning. 18 We believe that introduction of marginal tensile stress improves confinement of energy in the device by mitigating mechanical coupling with the clamping points.…”
Section: Resultsmentioning
confidence: 99%
“…Allen [28,29] to calculate thermal conductivity was derived from the Green Kubo formula and based on harmonic approximation relation. Interestingly, the thermal conductivity of propagon 13 modes converged after a "plateau" region (5-30K), but that of diffuson modes kept increasing to about 100K.…”
Section: Phonon Modeling For Disordered Materialsmentioning
confidence: 99%
“…This effect has been observed in many experiments as well. [7,[54][55][56][57][58][59][60][61][62][63][64][65][66][67][68][69][70][71][72] Recently it was reported that 1 GHz NEMS flexural mode resonators have been successfully fabricated. [70] The 1 GHz resonators have a low quality factor, Q ∼ 500, although the cause for this has not yet been explained.…”
Section: Atomistic Effects In Nemsmentioning
confidence: 99%