Low Temperature Flat Panel Display Driver Circuits in RTP Crystallized Polysilicon

Abstract

The crystallization of amorphous silicon by rapid thermal processing has some important advantages over other techniques such as laser annealing. This work investigates the characteristics of low temperature polysilicon flat panel display driver circuits fabricated in RTP crystallized polysilicon. Both digital (shift register) and analog (operational amplifier) circuits are presented.

LP‐1: Late‐News Poster: Polysilicon TFT Display Driver Circuits on Stainless Steel Foil Substrates

“…The dynamic S/R design was also characterized and found to have a maximum operating frequency of 130 kHz at a supply voltage of 20V. These same register designs had been previously fabricated on quartz substrates and were found to have maximum operating clock frequencies greater than 2.5MHz, both for the dynamic [4] and the static design, for the same supply voltage. This large difference in maximum operating frequency can not be attributed only to differences in device performance but is also a result of using a conductive steel substrate.…”

3.3: Display Driver Circuits Fabricated on Flexible Stainless Steel Foils

“…Other crystallization approaches such as furnace annealing have also been utilized, but with significantly lower returns in device performance [6,7]. Progress has continued in the field, resulting in devices with mobility values higher than 200cm 2 /Vs and the fabrication of functional digital circuits for the first time on metal foils [8,9]. From the application viewpoint, thin metal foils have been recently utilized in the fabrication of active-matrix, a-Si TFT digital ink displays [10].…”