1995
DOI: 10.1149/1.2044248
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Low Temperature Electrochemical Synthesis and Dielectric Characterization of Barium Titanate Films Using Nonalkali Electrolytes

Abstract: Polycrystalline BaTiQ thin films of approximately 1 ~m thickness have been synthesized on Ti substrates by an electrochemical process using nonalkali electrolytes, at temperatures as low as 55~The effect of various processing parameters, such as solution chemistry, atmosphere, quality of substrate surface, applied voltage, temperature, and reaction time have been discussed. Film thickness and uniformity increase with reaction time up to 24 h. The quantity of total electric charge passed through the electrolyti… Show more

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Cited by 30 publications
(16 citation statements)
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“…9,14,15 In the present work, based on the high dielectric loss, even under optimum processing conditions, it is believed that the intrinsic oxygen vacancies have a major role in contributing to the dielectric losses in the anodically derived materials. Thus, based on the current work and reports in the literature, [6][7][8][9][10][11] it is likely that barium titanate electrolytic capacitors, in a manner similar to tantalum and Fig. 10.…”
Section: (4) Capacitor Fabrication and Dielectric Propertiesmentioning
confidence: 52%
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“…9,14,15 In the present work, based on the high dielectric loss, even under optimum processing conditions, it is believed that the intrinsic oxygen vacancies have a major role in contributing to the dielectric losses in the anodically derived materials. Thus, based on the current work and reports in the literature, [6][7][8][9][10][11] it is likely that barium titanate electrolytic capacitors, in a manner similar to tantalum and Fig. 10.…”
Section: (4) Capacitor Fabrication and Dielectric Propertiesmentioning
confidence: 52%
“…The use of barium acetate electrolytes to synthesize carbonate-free BaTiO 3 thin films on planar titanium substrates at an applied voltage of 3 V has been reported. 10 However, significantly larger electrolysis currents (100-200 mA) in the treatment of titanium anodes, compared to those of the planar substrates (5-25 mA), might have caused the breakdown.…”
Section: (3) Electrochemical Formation Of Batiomentioning
confidence: 99%
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“…A detailed formation mechanism is not clear, but in situ formation of several types of crystalline oxide films have been observed previously. [4][5][6][7][8][9][10][11] Crystallization of hydroxide on the anode is an interesting phenomena, but there is scant literature reporting crystalline ZrO 2 formation in weakly basic solutions at temperatures as low as 100°C. Electrochemical synthesis of ZrO 2 films or powders by the cathodic method have been attempted by Switzer and Phillips 22 and Gal-Or' and co-workers, 23,24 but only amor- Fig.…”
Section: (B) Electrophoretic Deposition Of Gelatinous Zr(oh)mentioning
confidence: 99%