2018
DOI: 10.1016/j.surfcoat.2018.08.064
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Low-temperature chemical vapor deposition (CVD) of metallic titanium film from a novel precursor

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Cited by 19 publications
(8 citation statements)
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“…TiCl 2 powders were synthesized in a fluidized bed, where Ti powders were fluidized by Ar and reacted with TiCl 4 at 600°C. The details showed in our previous paper . Solid state TiCl 2 (s) powders (3.0 g) were sublimated into gas state TiCl 2 (g), and then it was transported to a reaction area to react with N 2 and H 2 or CH 4 in a tube furnace (6 cm diameter).…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…TiCl 2 powders were synthesized in a fluidized bed, where Ti powders were fluidized by Ar and reacted with TiCl 4 at 600°C. The details showed in our previous paper . Solid state TiCl 2 (s) powders (3.0 g) were sublimated into gas state TiCl 2 (g), and then it was transported to a reaction area to react with N 2 and H 2 or CH 4 in a tube furnace (6 cm diameter).…”
Section: Methodsmentioning
confidence: 99%
“…The details showed in our previous paper. 24 Solid state TiCl 2 (s) powders (3.0 g) were sublimated into gas state TiCl 2 (g), and then it was transported to a reaction area to react with N 2 and H 2 or CH 4 in a tube furnace (6 cm diameter). The tube furnace was previously purged by Argon for 30 minutes to eliminate the residual air.…”
Section: Methodsmentioning
confidence: 99%
“…This approach is highly costly and only suitable for the relatively planar substrates of simple geometry. In contrast, CVD utilizes the chemical reaction of low-cost gaseous Ti-containing precursors to form a solid Ti deposit on the substrate [16]. Chemical vapor deposition (CVD) is a versatile process widely utilized across various applications including the production of coating, powders, fibers, and consistent components.…”
Section: Chemical Vapor Depositionmentioning
confidence: 99%
“…[ 37 ] Several Ti‐based nanoparticles have been created in desirable single crystals via this method. [ 38 ] The CVD growing technique is flexible and can be utilized as an universal method for creating a wide range of high‐quality 2D ultrathin transition metal carbides crystals. [ 39 ] For example, Wu et al.…”
Section: Classification and Synthesis Guidance For Titanium‐based Nan...mentioning
confidence: 99%
“…Lin et al designed a multifunctional black mesoporous TiO 2 (BMT) nanovaccine for gas therapy, SDT and immunotherapy. [ 38a ] L‐arginine (LA) was loaded on BMT which served as the exogenous NO supplementation, and BTM as acoustic sensitizer for sonodynamic treatment. After the exogenous stimulus of US, BMT, and LA could be triggered simultaneously and produce singlet oxygen and NO gas, respectively.…”
Section: Optimization Strategy For Enhanced Therapeutic Efficacy Of Sdtmentioning
confidence: 99%