2016
DOI: 10.1117/1.jnp.10.036003
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Low-stress phase plates produced by serial bideposition of TiO2thin films

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Cited by 4 publications
(2 citation statements)
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“…Crystallinity and inner nano‐structure in thin film material can also cause optical losses . Therefore, scanning electron microscopy (SEM) and X‐ray diffraction were used for analysis of the inner structure of nano‐sculptured thin films.…”
Section: Resultsmentioning
confidence: 99%
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“…Crystallinity and inner nano‐structure in thin film material can also cause optical losses . Therefore, scanning electron microscopy (SEM) and X‐ray diffraction were used for analysis of the inner structure of nano‐sculptured thin films.…”
Section: Resultsmentioning
confidence: 99%
“…[26] Crystallinity and inner nano-structure in thin film material can also cause optical losses. [27] Therefore, scanning electron In the beginning of the film growth, average widths of the columns were equal to 29 nm for silica and 20 nm for alumina. When films thicknesses reached 400 nm, the coalescence of columns has been started and the width of the individual element extended to 31 and 88 nm for SiO 2 and Al 2 O 3 , respectively.…”
Section: Structural and Elemental Analysis Of Nano-sculptured Thin Filmsmentioning
confidence: 99%