2000
DOI: 10.1109/20.908599
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Low resistance spin-dependent tunneling junctions with naturally oxidized tunneling barrier

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Cited by 13 publications
(5 citation statements)
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“…The current-voltage (I -V ) characteristics of the devices were measured using a probe station with a HP 4156A semiconductor parameter analyser. The surface of the Al film was expected to oxidize during the ozone treatment, resulting in an oxide layer comparable to that observed by prolonged air exposure (6-16 Å) [28]. Since the overall film was 140 nm thick, the contact-to-nanowire interface was expected to be unoxidized, so the primary effect on contact properties was expected to be somewhat increased difficulty in breaking through the surface oxide with the probe pads.…”
Section: Fabrication and Experimental Detailsmentioning
confidence: 99%
“…The current-voltage (I -V ) characteristics of the devices were measured using a probe station with a HP 4156A semiconductor parameter analyser. The surface of the Al film was expected to oxidize during the ozone treatment, resulting in an oxide layer comparable to that observed by prolonged air exposure (6-16 Å) [28]. Since the overall film was 140 nm thick, the contact-to-nanowire interface was expected to be unoxidized, so the primary effect on contact properties was expected to be somewhat increased difficulty in breaking through the surface oxide with the probe pads.…”
Section: Fabrication and Experimental Detailsmentioning
confidence: 99%
“…The advantage for the use of Al 2 O 3 as barrier layer is that Al 2 O 3 is a very dense oxide and the oxygen bonding energy in Al 2 O 3 is relatively high (N3 eV). In previous works, the Al 2 O 3 barrier layer was formed by natural and plasma oxidation [8][9][10]. In our work, we use room temperature oxidation under a molecular O 2 flux.…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8][9][10][11][12][13][14][15] Due to different H c and high saturation magnetization, the NiFe and CoFe FM alloy layers have been extensively used in MTJs. 3,[16][17][18] However, in all these reports, amorphous Al 2 O 3 has been used as the tunnel barrier. It is known that the choice of spacer layer, its crystalline quality, and its roughness with the two adjoining FM layers is critical to the overall magnetotransport behaviour of MTJs.…”
Section: Introductionmentioning
confidence: 99%