Ion beam and thermally-induced interface reactions between high Tc superconducting thin film of Y1Ba2Cu3Ov x and metal overlayer of Ag are studied with a view to control the interfacial property of contact resistance, The interface reaction is induced by 100keV Ar + ion beam with different ion dose values ranging from 5 x 10 ~3 to 3 x 1014 ions/cm 2. The YBaCuO film-metal interface is characterized by using the small angle XRD to study the structural properties of the interracial phases. The electrical property of the interface, specifically contact resistance, has been investigated for different dose values and thermal treatments. Three-probe vs four-probe configuration has been adopted to measure the contact resistance. Keywnrds. High Tc superconducting YBaCuO film; contact resistance; ion beam mixing.