Effective passivation of YBaCuO superconducting bridges by photoresist overlayers

Reddy, G S N; Gupta, Arunava; Tomar, V S; Khare, Neeraj; Ojha, V. N.; Walia, D K

doi:10.1016/0011-2275(91)90178-y

Cited by 2 publications

(1 citation statement)

References 11 publications

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“…Several passivation layers have been investigated i.e. HF solution or vapour to form surface fluoridation [6,7], different kinds of metal oxides [8][9][10], silicon based layers [8,[10][11][12], CaF 2 [8,11], photoresists [13], YSZ [11], amorphous YBCO [14], SrTiO 3 [15], polyimide and PMMA films [16] and others [17,18]. Some appropriate passivations of YBCO films have been found, but none of the authors report on a satisfactory passivation of sensitive YBCO structures like Josephson junctions and SQUIDs.…”

Section: Introductionmentioning

confidence: 99%

Plasmapolymerized hexamethyldisilasane for the passivation of devices

Mex¹,

Francke²,

Müller³

1998

Supercond. Sci. Technol.

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Electronic devices based on the high-temperature superconductor (YBCO) may deteriorate in the operating environment under the influence of moisture, atmospheric carbon dioxide and frequent thermal cycling. To avoid these impairments a passivation layer was developed which is deposited by polymerization of the silicon organic compound hexamethyldisilasane (HMDS-N) in a plasma enhanced chemical vapour deposition (PECVD) process. The 100 nm thin films exhibit excellent passivation properties which is confirmed by electrical transport measurements of passivated wide and 100 nm high YBCO lines and step edge Josephson junctions exposed to humidity and . No degradation in the critical parameters such as the critical current , the normal resistance and the flux-voltage modulation depth is observed on step edge dc-SQUIDs owing to the deposition of the passivation layer. Atomic force microscope (AFM) measurements show a smooth morphology of these layers without pinholes and an excellent coverage of the YBCO even at the edges of lines. Furthermore, the passivation layer can be used as an isolation and scratch protection between SQUIDs and thin-film flux transformers in flip-chip magnetometers.

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Section: Introductionmentioning

confidence: 99%

Plasmapolymerized hexamethyldisilasane for the passivation of devices

Mex¹,

Francke²,

Müller³

1998

Supercond. Sci. Technol.

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Environmental Stability of High T_c Superconducting Ceramics

Barkatt¹,

Hojaji²,

Amarakoon³

et al. 1993

MRS Bull.

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The discovery of high Tc superconductivity in layered cuprate ceramics has so far led to the identification of about 35 distinct superconducting cuprate systems, the latest of which is the 133 K superconducting system Hg-Ba-Ca-Cu-O. For most of their proposed applications, high Tc ceramics have to be resistant to environmental degradation both with respect to atmospheric water vapor, e.g., in storage, and to liquid water (produced by condensation on warm-up from cryogenic conditions). The presence of CO2 is an important factor in both environments. Increasing environmental stability involves improving the processing methods to eliminate pores, cracks, and other macroscopic defects (e.g., highly leachable impurity phases) which are prevalent in materials prepared by solid-state sintering. Furthermore, protective coatings and hermetic seals are necessary in many applications involving films because of small film thickness. (Wires are usually drawn inside metal tubes, which provide protection.)

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Effective passivation of YBaCuO superconducting bridges by photoresist overlayers

Cited by 2 publications

References 11 publications

Plasmapolymerized hexamethyldisilasane for the passivation of devices

Plasmapolymerized hexamethyldisilasane for the passivation of devices

Environmental Stability of High T_c Superconducting Ceramics

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Effective passivation of YBaCuO superconducting bridges by photoresist overlayers

Cited by 2 publications

References 11 publications

Plasmapolymerized hexamethyldisilasane for the passivation of devices

Plasmapolymerized hexamethyldisilasane for the passivation of devices

Environmental Stability of High Tc Superconducting Ceramics

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Environmental Stability of High T_c Superconducting Ceramics