Low power NDIR CO&lt;inf&gt;2&lt;/inf&gt; sensor based on CMOS IR emitter for boiler applications

Ali, SZ; Luca, Andrea De; Rácz, Zoltán; Tremlett, Piers R.; Wotherspoon, Tracy; Gardner, J. W.; Udrea, F.

doi:10.1109/icsens.2014.6985155

Cited by 8 publications

(7 citation statements)

References 12 publications

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“…Medical CO2 sensors must operate in the conditions experienced on exhaled breath. Harsh environment CO2 sensors have also been reported [23], but their robust and costly design is not appropriate for breath sensing.…”

Section: Ndir Sensorsmentioning

confidence: 99%

A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels

Vincent

Gardner

2016

Sensors and Actuators B: Chemical

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142

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Please cite this article as: T.A.Vincent, J.W.Gardner, A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels, Sensors and Actuators B: Chemical http://dx.doi.org/10. 1016/j.snb.2016.04.016 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels Highlights  MEMS based NDIR system for ppm CO2 detection with lock-in amplifier.  Fast 1.3 s response time for breath-by-breath analysis.  Portable breath analyser designed for measuring metabolic rate of subjects.  Effect of path length on NDIR system investigated with novel sensor housing.  Silicon on insulator IR emitter used for low power, low cost gas detection. AbstractThe molecules in our breath can provide a wealth of information about the health and well-being of a person. The level of carbon dioxide (CO2) is not only a sign of life but also when combined with the level of exhaled oxygen provides valuable health information in the form of our metabolic rate. We report upon the development of a MEMS-based non-dispersive infrared CO2 sensor for inclusion in a hand held portable breath analyser. Our novel sensor system comprises a thermopile detector and low power MEMS silicon on insulator (SOI) wideband infrared (IR) emitter. A lock-in amplifier design permits a CO2 concentration of 50 ppm to be detected on gas bench rig. Different IR path lengths were studied with gases in dry and humid (25 % and 50 % RH) in order to design a sensor suitable for detecting CO2 in breath with concentrations in the range of 4 to 5 %. A breath analyser was constructed from acetal and in part 3D printed with a side-stream sampling mechanism and tested on a range of subjects with two data-sets presented here. The performance of the novel MEMS based sensor was validated using a reference commercial breath-by-breath sensor and produced comparable results and gave a response time of 1.3 s. Further work involves the detection of other compounds on breath for further metabolic analysis and reducing the overall resolution of our MEMS sensor system from ca. 250 ppm to 10 ppm.

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Section: Ndir Sensorsmentioning

confidence: 99%

A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels

Vincent

Gardner

2016

Sensors and Actuators B: Chemical

Self Cite

142

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“…However, these devices are often quite bulky and suffer from high power consumption, slow transient response and aging effects. In recent years, micro-electro-mechanical systems (MEMS) based miniaturized IR thermal emitters have become available 24 25 26 . They comprise a resistive heating element embedded within a thermally isolating structure, which enables low power consumption and fast heating/cooling times 27 and it is possible to use standard CMOS-compatible fabrication processes to fabricate MEMS based thermal emitters with good reproducibility, in volume and at low cost 28 .…”

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confidence: 99%

A highly efficient CMOS nanoplasmonic crystal enhanced slow-wave thermal emitter improves infrared gas-sensing devices

Pusch

Luca

et al. 2015

Sci Rep

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The application of plasmonics to thermal emitters is generally assisted by absorptive losses in the metal because Kirchhoff’s law prescribes that only good absorbers make good thermal emitters. Based on a designed plasmonic crystal and exploiting a slow-wave lattice resonance and spontaneous thermal plasmon emission, we engineer a tungsten-based thermal emitter, fabricated in an industrial CMOS process, and demonstrate its markedly improved practical use in a prototype non-dispersive infrared (NDIR) gas-sensing device. We show that the emission intensity of the thermal emitter at the CO2 absorption wavelength is enhanced almost 4-fold compared to a standard non-plasmonic emitter, which enables a proportionate increase in the signal-to-noise ratio of the CO2 gas sensor.

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“…The CMOS based IR source, studied in this work, consists of a micro-heater, fabricated using tungsten metallization, which can be heated to high operating temperatures [8], [9]. The device typically operates at temperatures around 500 °C [9] to thermally generate optical emission for mid-IR spectroscopy applications, including optical gas sensing [5].…”

Section: Introductionmentioning

confidence: 99%

High temperature characterization of a CMOS based infra-red source using thermal-incandescence microscopy

Pandey

Oxley

Hopper

et al. 2020

Solid-State Electronics

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This paper presents the high temperature thermal characterization of a Micro-Electro-Mechanical Systems (MEMS) infra-red (IR) thermal source, using non-contact optical approaches, based on IR and thermo-incandescence microscopy. The IR thermal source was fabricated using a CMOS based processing technology and consists of a miniature micro-heater, fabricated using tungsten metallization. The performance and reliability of the IR source is highly dependent on its operating temperature. For short-wave (1.4 µm -2.5 µm) infra-red emission, the operating temperature is in excess of 800°C. Work will be presented in this paper in which spot temperature measurements (> 700 °C) were made on the IR source using thermal-incandescence microscopy. Thermal-optical calibration was achieved by utilizing the known melting point (MP) of different metal microparticles. Optical measurements were compared to those obtained using an electrical approach. The thermal measurements suggest good temperature uniformity across the micro-heater of the IR source.

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Low power NDIR CO<inf>2</inf> sensor based on CMOS IR emitter for boiler applications

Cited by 8 publications

References 12 publications

A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels

A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels

A highly efficient CMOS nanoplasmonic crystal enhanced slow-wave thermal emitter improves infrared gas-sensing devices

High temperature characterization of a CMOS based infra-red source using thermal-incandescence microscopy

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