2008
DOI: 10.1063/1.2990646
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Low noise superconducting single photon detectors on silicon

Abstract: We have fabricated superconducting nanowire single photon detectors made of NbTiN on a silicon substrate. This type of material reduces the dark count rate by a factor of 10 compared to identical NbN detectors, enabling single photon detection with unprecedented signal to noise ratio: we report a noise equivalent power of 10−19 W Hz−1/2 at 4.2 K. The compatibility of our superconducting device with silicon enables its integration with complex structures.

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Cited by 133 publications
(97 citation statements)
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References 14 publications
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“…5,6 The active element of these detectors consists of a typically square meander of a superconducting NbN film of a few nanometer thickness. 7 Recently, alternative superconducting materials have been suggested, such as NbTiN, 8 TaN, 9 or WSi, 10 which may be better suited than NbN for certain applications. The detectors are biased with a constant direct current I bias which usually equals about 90% to 95% of the experimental critical current I c .…”
Section: Introductionmentioning
confidence: 99%
“…5,6 The active element of these detectors consists of a typically square meander of a superconducting NbN film of a few nanometer thickness. 7 Recently, alternative superconducting materials have been suggested, such as NbTiN, 8 TaN, 9 or WSi, 10 which may be better suited than NbN for certain applications. The detectors are biased with a constant direct current I bias which usually equals about 90% to 95% of the experimental critical current I c .…”
Section: Introductionmentioning
confidence: 99%
“…11 One recent important advance in the SNSPD field has been the introduction of amorphous superconductors such as tungsten silicide (WSi), 12 molybdenum silicide (MoSi) 13,14 and molybdenum germanium (MoGe). 15 SNSPDs based on these materials currently have the highest reported detection efficiencies (93% for WSi 12 ), as well as a higher fabrication yield 16 than devices made of polycrystalline materials such as niobium nitride (NbN), 1 niobium titanium nitride (NbTiN) 17 and tantalum nitride (TaN). 18 MoSi SNSPDs tailored to specific advanced photon counting applications have recently been reported, including integration on an optical waveguide, 19 UV single-photon detection 20 and integrated ion trapping.…”
mentioning
confidence: 99%
“…Thin films from NbTiN offer advantages in fabrication, and the resulting SNSPD may have lower dark-count rates. 9 Detectors made from MgB 2 still suffer from the low quality of ultra-thin MgB 2 films. 10 Very recently, two reports with similar objectives have been published.…”
mentioning
confidence: 99%