Materials with a small superconducting energy gap are expected to favor a high detection efficiency of low-energy photons in superconducting nanowire single-photon detectors. We developed a TaN detector with smaller gap and lower density of states at the Fermi energy than in comparable NbN devices, while other relevant parameters remain essentially unchanged. The observed reduction of the minimum photon energy required for direct detection is in line with model predictions of ≈ 1/3 as compared to NbN.
Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature T C=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm2 at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.
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