2019 Conference on Lasers and Electro-Optics Europe &Amp; European Quantum Electronics Conference (CLEO/Europe-EQEC) 2019
DOI: 10.1109/cleoe-eqec.2019.8872554
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Low Loss Suspended Silicon Waveguide and Photonic Crystal for THz Regime

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“…Headland et al showed silicon waveguide-based THz systems working between 260-390 GHz [18]. Multiple topologies of silicon on insulator (SoI)-based waveguides [19,20] and integrated Terahertz resonators [21,22], waveguides based on silicon-BCB-quartz platform [12] and suspended silicon THz waveguides [23,24] report relatively low losses between 0.4-1 dB/cm, and feature a bandwidth ranging between 100-250 GHz. Free-standing multimode dielectric waveguides with excellent transitions were demonstrated using dielectric rod waveguides [25,26].…”
Section: Introductionmentioning
confidence: 99%
“…Headland et al showed silicon waveguide-based THz systems working between 260-390 GHz [18]. Multiple topologies of silicon on insulator (SoI)-based waveguides [19,20] and integrated Terahertz resonators [21,22], waveguides based on silicon-BCB-quartz platform [12] and suspended silicon THz waveguides [23,24] report relatively low losses between 0.4-1 dB/cm, and feature a bandwidth ranging between 100-250 GHz. Free-standing multimode dielectric waveguides with excellent transitions were demonstrated using dielectric rod waveguides [25,26].…”
Section: Introductionmentioning
confidence: 99%