Low-loss silicon-on-insulator photonic crystal waveguides

Arentoft, Jesper; Søndergaard, Thomas; Kristensen, Martin; Boltasseva, Alexandra; Thorhauge, Morten; Frandsen, Lars Hagedorn

doi:10.1049/el:20020188

Cited by 74 publications

(40 citation statements)

References 4 publications

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“…It has already been shown that thermal oxidation of SOI waveguides can smooth the sidewalls of both photonic-crystal waveguides [18] and photonic wires [19]. As the rate of oxidation is well documented and can be controlled quite accurately with the temperature, this is a reliable way of reducing roughness.…”

Section: B Roughness Reductionmentioning

confidence: 99%

Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology

Bogaerts

Baets

Dumon

et al. 2005

J. Lightwave Technol.

648

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Abstract-High-index-contrast, wavelength-scale structures are key to ultracompact integration of photonic integrated circuits. The fabrication of these nanophotonic structures in silicon-on-insulator using complementary metal-oxide-seminconductor processing techniques, including deep ultraviolet lithography, was studied. It is concluded that this technology is capable of commercially manufacturing nanophotonic integrated circuits. The possibilities of photonic wires and photonic-crystal waveguides for photonic integration are compared. It is shown that, with similar fabrication techniques, photonic wires perform at least an order of magnitude better than photonic-crystal waveguides with respect to propagation losses. Measurements indicate propagation losses as low as 0.24 dB/mm for photonic wires but 7.5 dB/mm for photonic-crystal waveguides.

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Section: B Roughness Reductionmentioning

confidence: 99%

Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology

Bogaerts

Baets

Dumon

et al. 2005

J. Lightwave Technol.

648

View full text Add to dashboard Cite

show abstract

“…The air holes also extend into the silica. For the experimental structure [35], [36], silica is grown on top of the structure by thermal oxidation. This makes the structure more symmetric in the vertical dimension.…”

Section: Design Guidelines Based On 2-d Calculationsmentioning

confidence: 99%

“…For a specific structure that has been experimentally fabricated [35], [36], 3-D calculations are given in Section III for the dispersion relations and field profiles. The 3-D analysis is compared with the 2-D calculations.…”

mentioning

confidence: 99%

Theoretical analysis of finite-height semiconductor-on-insulator-based planar photonic crystal waveguides

Søndergaard

Arentoft

Kristensen

2002

J. Lightwave Technol.

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“…This research was largely inspired and influenced by the progress and ideas in the field of planar dielectric photonic crystal structures. [29][30][31] There exist, however, important differences between these configurations.…”

Section: Introductionmentioning

confidence: 99%