Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing

Völk, Martin; Suntsov, Sergiy; Rüter, Christian E.; Kip, Detlef

doi:10.1364/oe.24.001386

Cited by 88 publications

(35 citation statements)

References 16 publications

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“…Several fabrication methods have been demonstrated to achieve the removal of the surrounding lithium niobate. A purely mechanical one has been reported using a precision dicing saw to remove the lithium niobate on either side of the waveguide . This method achieved waveguides with a loss of 1.2 dB/cm for the TE and 2.8 dB/cm for the TM mode .…”

Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

“…A purely mechanical one has been reported using a precision dicing saw to remove the lithium niobate on either side of the waveguide . This method achieved waveguides with a loss of 1.2 dB/cm for the TE and 2.8 dB/cm for the TM mode . The clear downside of using a dicing saw to fabricate wire waveguides is that only straight cuts and therefore straight waveguides are possible.…”

Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

“…[34][35][36] This method achieved waveguides with a loss of 1.2 dB/cm for the TE and 2.8 dB/cm for the TM mode. [35] The clear downside of using a dicing saw Reproduced with permission. [37] Copyright 2014, Optical Society of America.…”

Section: Optical Waveguidesmentioning

confidence: 99%

See 2 more Smart Citations

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Boes

Corcoran

Chang

et al. 2018

Laser & Photonics Reviews

545

290

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Lithium niobate on insulator (LNOI) technology is revolutionizing the lithium niobate industry, enabling higher performance, lower cost and entirely new devices and applications. The availability of LNOI wafers has sparked significant interest in the platform for integrated optical applications, as LNOI offers the attractive material properties of lithium niobate, while also offering the stronger optical confinement and a high optical element integration density that has driven the success of more mature silicon and silicon nitride (SiN) photonics platforms. Due to some similarities between LNOI and SiN, established techniques and standards can readily be adapted to the LNOI platform including a significant array of interface approaches, device designs and also heterogeneous integration techniques for laser sources and photodetectors. In this contribution, we review the latest developments in this platform, examine where further development is necessary to achieve more functionalities in LNOI integrated optical circuits and make a few suggestions of interesting applications that could be realized in this platform.

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Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

See 1 more Smart Citation

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Boes

Corcoran

Chang

et al. 2018

Laser & Photonics Reviews

545

290

View full text Add to dashboard Cite

show abstract

“…Some encouraging results were obtained in studies of LNOI-based optical elements, such as photonic crystals [4,5], high-Q microresonators [6][7][8], ridge-waveguides [9,10], proton-exchanged waveguides [11][12][13] and modulators [14], hybrid lightwave circuits LNOI-SOI [15], etc. These results indicate that LNOI is an appropriate platform for integrated optics.…”

Section: Introductionmentioning

confidence: 96%

Domain Patterning in Ion-Sliced LiNbO3 Films by Atomic Force Microscopy

Volk

Гайнутдинов

Zhang³

2017

Crystals

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Photonic structures denoted as LNOI (LiNbO 3 -on-insulator) are of considerable interest for integrated optics due to a high refractive-index contrast provided by the interface LiNbO 3 /insulator. A topical problem for LNOI-based optical waveguides is optical-frequency conversion, in particular realized on ferroelectric domains on the basis of quasi phase-matching principle. This paper presents extended studies on the fabrication of domain patterns by atomic force microscopy (AFM) methods (raster lithography, piezo-force microscopy, conductive AFM) in single-crystal ion-sliced LiNbO 3 films forming LNOI sandwiches. A body of data obtained on writing characteristics of domains and specified 1D and 2D domain patterns permitted us to manipulate the domain sizes and shapes. Of special importance is the stability of created patterns, which persist with no degradation during observation times of months. The domain coalescence leading to the transformation of a discrete domain pattern to a continuous one was investigated. This specific effect-found in thin LiNbO 3 layers for the first time-was attributed to the grounding of space-charges accumulated on domain walls. Observations of an enhanced static conduction at domain walls exceeding that in surrounding areas by not less than by five orders of magnitude supports this assumption. AFM domain writing in ion-sliced films serves as a basis for studies in nonlinear photonic crystals in integrated optical schemes.

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“…For instance, RIE process is obviously anisotropic, ICP-RIE produces LiF deterioration on the surface resulting in high scattering loss, FIB and wet etching are both time-costing for practical application. And as far as we are concerned, LN material after treated by these etching methods faces the problems of high loss [6][7][8], shallow sidewall angle [6,[9][10][11], limited etch rate [12][13][14][15], or a combination thereof. In 1922, Laurell et al [16] proposed a new wet-etching method by using PE and a mixture of HF/HNO 3 acids for LiNbO 3 to overcome the drawbacks caused by a dry-etching process, and finally obtained a ridge waveguide with smooth etching surface.…”

Section: Introductionmentioning

confidence: 99%

Research of selective etching in LiNbO₃ using proton-exchanged wet etching technique

Liu¹,

Lan²,

Yang³

et al. 2020

Mater. Res. Express

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Lithium niobate material (LN) has shown great application potentials in the fabrication of integrated optical devices due to its excellent physical properties, especially with the occurrence of lithium niobate-on-insulator (LNOI) substrate. However, the greatest challenge of micro/nano optical devices based on LN material lies in the precise etching process and thus limits its applications. In this paper, we comprehensively analyze the etching results treated by the proposed proton-exchanged wet-etching method (PEWE) combining with theoretical simulations and experiments. It is found that the proton-exchanged layer in the LN material can be easily etched after using a mixture acid of HF/HNO 3 , leading to the improvement of etching rate and surface morphology. The lowest roughness of the optical waveguide is measured to be 0.81 nm, which is beneficial for the performance improvement of LN-based optical devices. Ultimately, a quasi-vertical sidewall of the upper part of optical waveguide with improved surface morphology is successfully realized by utilizing the PEWE. Moreover, this method could also be extended to improve the performance of LNOI-based optical devices and pave the way for ultra-compact photonic integrated circuits based on LNOI.

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Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing

Cited by 88 publications

References 16 publications

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Domain Patterning in Ion-Sliced LiNbO3 Films by Atomic Force Microscopy

Research of selective etching in LiNbO₃ using proton-exchanged wet etching technique

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Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing

Cited by 88 publications

References 16 publications

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Domain Patterning in Ion-Sliced LiNbO3 Films by Atomic Force Microscopy

Research of selective etching in LiNbO3 using proton-exchanged wet etching technique

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Research of selective etching in LiNbO₃ using proton-exchanged wet etching technique