2018
DOI: 10.1002/lpor.201700256
|View full text |Cite
|
Sign up to set email alerts
|

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Abstract: Lithium niobate on insulator (LNOI) technology is revolutionizing the lithium niobate industry, enabling higher performance, lower cost and entirely new devices and applications. The availability of LNOI wafers has sparked significant interest in the platform for integrated optical applications, as LNOI offers the attractive material properties of lithium niobate, while also offering the stronger optical confinement and a high optical element integration density that has driven the success of more mature silic… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

2
283
1

Year Published

2019
2019
2024
2024

Publication Types

Select...
8

Relationship

0
8

Authors

Journals

citations
Cited by 507 publications
(287 citation statements)
references
References 162 publications
2
283
1
Order By: Relevance
“…The supported wavelength region of several waveguide materials in the visible range, up to the mid-infrared region, is shown in figure 10. Current research includes the use of lithium niobate (LiNbO 3 ), which is transparent at the VIS and mid-infrared wavelength regime [62,63]. However, Si 3 N 4 platforms are the only ones currently available for multi-project wafer (MPW) runs, supporting VIS waveguides.…”
Section: Visible Lightmentioning
confidence: 99%
“…The supported wavelength region of several waveguide materials in the visible range, up to the mid-infrared region, is shown in figure 10. Current research includes the use of lithium niobate (LiNbO 3 ), which is transparent at the VIS and mid-infrared wavelength regime [62,63]. However, Si 3 N 4 platforms are the only ones currently available for multi-project wafer (MPW) runs, supporting VIS waveguides.…”
Section: Visible Lightmentioning
confidence: 99%
“…Lithium niobate (LN), known as the optical silicon in the current optoelectronics age, is one of the most widelyused materials for the fabrication of integrated optical devices because of its commercial availability and multifunctional properties [1], such as the excellent transparency from visible to infrared light, high nonlinearity and large electro-optical coefficient [2]. During the past decades, LN material has drawn great attentions in realizing high-density integrated photonic/optical circuits due to its high performance [3], especially with the occurrence of a newly-arisen optical material, namely, lithium niobate-on-insulator (LNOI). However, the LN material is chemically inert, as a result, it can hardly be etched without any pre-treatments.…”
Section: Introductionmentioning
confidence: 99%
“…For LNOI platform, high difference of refractive index contrast of the fabricated channel waveguides is obtained due to its unique structure, leading to a better optical confinement in a much smaller volume. To realize the ultra-compact integrated photonic circuits, several kinds of etching methods have been reported to fabricate high refractive index difference waveguides based on the LN material, such as reactive ion beam etching (RIE), inductively coupled plasma etching (ICP-RIE), focused ion milling (FIB), and wet etching and so on [3][4][5]. Nevertheless, some inevitable problems exist in these etching methods.…”
Section: Introductionmentioning
confidence: 99%
“…Just like silicon as the backbone of electronic industry, LN acts as a multipurpose material platform for photonics and optoelectronic systems . During the past decades, most of the attention was drawn to realize high‐density integrated photonic/optical circuits using LN . But LN is chemically inert, so it cannot be chemically etched.…”
Section: Introductionmentioning
confidence: 99%
“…[6] During the past decades, most of the attention was drawn to realize high-density integrated photonic/optical circuits using LN. [7,8] But LN is chemically inert, so it cannot develop the next generation of metasurfaces based on various ferroelectric crystals.…”
Section: Introductionmentioning
confidence: 99%