2006
DOI: 10.1049/el:20063077
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Low-loss propagation in photonic crystal waveguides

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Cited by 100 publications
(49 citation statements)
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“…The main challenge is to etch the thicker device layer of 500 nm with comparable roughness, to that already achieved in the 220 nm thick layers used for 1.5 µm operation. In the near-IR, propagation losses below 5 dB/cm [18] with a record of 2 dB/cm [19] have been achieved, and roughness values below 1 nm have been demonstrated [20]. Such low roughness is already close to the technological limit and further improvements require additional improvements in more loss-tolerant waveguide designs [10].…”
Section: Characterisationmentioning
confidence: 98%
“…The main challenge is to etch the thicker device layer of 500 nm with comparable roughness, to that already achieved in the 220 nm thick layers used for 1.5 µm operation. In the near-IR, propagation losses below 5 dB/cm [18] with a record of 2 dB/cm [19] have been achieved, and roughness values below 1 nm have been demonstrated [20]. Such low roughness is already close to the technological limit and further improvements require additional improvements in more loss-tolerant waveguide designs [10].…”
Section: Characterisationmentioning
confidence: 98%
“…Therefore, the Si PC slab (n = 3.47) in our study is suspended in air. Air-bridge photonic crystal structures can be practically fabricated by using selective wet etching techniques [27,28] and can be easily integrated with micro uidics [29]. The height of the PC slab is selected as h = 0.6a and seven rows of holes are introduced on each side of the line-defect.…”
Section: Design and Modelingmentioning
confidence: 99%
“…The lattice constant, a is adjusted to 432.5 nm. Membrane slab structures can be fabricated by selectively etching the substrate beneath the PC regions forming an air-bridge [11]. This structure provides a symmetric configuration preventing the decoupling of orthogonal polarisation states and a stronger index confinement along the vertical dimension.…”
Section: Design and Numerical Calculationsmentioning
confidence: 99%