Low-Loss Polymeric Optical Waveguides with 45° Mirrors

Yoshimura, R.; Hikita, Makoto; Tomaru, Satoru; Imamura, Saburo

doi:10.1143/jjap.37.3657

Cited by 22 publications

(12 citation statements)

References 8 publications

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“…The average excess loss due to the micromirrors was measured to be as low as 0.43 dB at the 830-nm wavelength. The excess loss of the micromirrors is one of the lowest values reported until now using the total internal reflection [5], [8]. The excess loss of 0.1 dB was reported from a metal coated mirror but with an extra process of metal coating [10].…”

Section: Resultsmentioning

confidence: 99%

“…Polymeric optical multimode waveguides for optical interconnection can be fabricated by various methods such as reactive ion etching (RIE) [7], [8], molding [9], hot embossing [10], laser direct writing [5], and contact printing lithography. 45 micromirrors can be fabricated using dicing with 45 diamond saw [8], laser ablation [5], RIE, and molding process [10].…”

Section: Fabrication Of Multimode Polymeric Waveguides Andmentioning

confidence: 99%

“…45 micromirrors can be fabricated using dicing with 45 diamond saw [8], laser ablation [5], RIE, and molding process [10].…”

Section: Fabrication Of Multimode Polymeric Waveguides Andmentioning

confidence: 99%

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Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

Kim

2004

IEEE Photon. Technol. Lett.

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Abstract-Multimode polymeric waveguides and 45 micromirrors have been fabricated using deep X-ray lithography. Polymethylmetacrylate was used as a core layer and silica and silicone elastomer as a lower and upper cladding layer, respectively. The propagation loss of the waveguide was 0.54 dB/cm at 830 nm and the loss of micromirrors was less than 0.43 dB at the wavelength. The X-ray lithography technique offers the controllability of mirror angles to 45 and 45 so that it gives flexibility to the system architecture of optical interconnections.Index Terms-Micromirror, optical interconnects, polymeric multimode waveguide, X-ray lithography.

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Section: Resultsmentioning

confidence: 99%

Section: Fabrication Of Multimode Polymeric Waveguides Andmentioning

confidence: 99%

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Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

Kim

2004

IEEE Photon. Technol. Lett.

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“…Various techniques are used to fabricate the polymer waveguides such as reactive ion etch (RIE) [3], photolithography [4], laser direct writing [5] and molding [6]. Soft molding (microtransfer molding) is chosen to fabricate the large-coresize waveguide because it is low cost, suitable for mass production and compatible with the PCB manufacturing process.…”

Section: Introductionmentioning

confidence: 99%

Low-loss thermally stable waveguide with 45° micromirrors fabricated by soft molding for fully embedded board-level optical interconnects

Wang

Choi

et al. 2005

SPIE Proceedings

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A high performance polymer waveguide array with 45° micromirrors was fabricated by soft molding to achieve fully embedded board-level optoelectronic interconnects. One-step-transferring of a 3-D polymer structure is demonstrated. Low-loss and thermally stable UV curable polymers based on fluorinated acrylate are chosen as waveguide core and cladding materials. A 45° total interior reflection (TIR) micromirror was formed by two methods: blade cutting and mechanical polishing. And the surface roughnesses are further improved by using a focused ion beam (FIB) technique. The high-quality 45° micromirror was obtained to provide surface-normal light coupling between waveguide and the optoelectronic devices. The measured propagation loss of the multimode waveguide was 0.156dB/cm at 850nm wavelength. The excess loss of the mirror was less than 1.5dB.

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“…Processing steps for fabricating polymeric waveguides include spin-coating, the photolithographic patterning of a photoresist to define the waveguide structure and plasma etching to form a channel waveguide. 3,4 This technique has a complicated process, and thus, is not cost effective for mass production. Indeed, this technique is not suitable to define large-core dimension.…”

Section: Introductionmentioning

confidence: 99%

Low-loss polymeric waveguides having large cores fabricated by hot embossing and micro-contact printing techniques

Yoon

2004

Macromol. Res.

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We present simple, low-cost methods for the fabrication of polymeric waveguides that have large core sizes for use as optical interconnects. We have used both hot embossing and micro-contact printing techniques for the fabrication of multimode waveguides using the same materials. Rectangular and large-core (60 × 60 μm 2 ) channels were readily prepared when using these methods. The dimensions of the embossed and printed channels were the same as those of the pattern on the original master. The polymeric waveguides that we fabricated with large core sizes exhibited a low propagation loss of 0.1 dB/cm at 850 nm, which indicates that hot embossing and micro-contact printing are suitable techniques for the fabrication of optical waveguides having large-core.

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Low-Loss Polymeric Optical Waveguides with 45° Mirrors

Cited by 22 publications

References 8 publications

Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

Low-loss thermally stable waveguide with 45° micromirrors fabricated by soft molding for fully embedded board-level optical interconnects

Low-loss polymeric waveguides having large cores fabricated by hot embossing and micro-contact printing techniques

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