Low-frequency noise (LFN) in III-V MODFET's is an important limitation of the device performances for applications such as nonlinear circuits that have noise upconversion. The LFN can be converted into the high-frequency range, resulting in undesired phase and frequency modulation. This has motivated investigations of LFN in GaAs/AlGaAs MODFET's [ 1,2] and to a lesser extend in InAIAshGaAs MODFET's [3,4]. These studies have in common that the origin of the noise sources is not clearly established. As a matter of fact, the LFN of a completed MODFET device is the result and the interplay of various noise sources whose each contribution can hardly be solely determined. Yet, a non ambiguous identification of the noise sources is highly desired if the optimization of the technological process is oriented toward the reduction of the LFN. In this work, we present a study of various LFN sources in InAlAshGaAs MODFET structures. The contributions of the main noise sources -drain and source contact resistance fluctuations, channel charge fluctuations and gate current noise -are separated by measuring the drain current power noise spectrum on uncompleted, gate free MODFET structures of different channel lengths. A variety of MBE grown structures was investigated : 6-and uniformlydoped MODFET's; devices with lattice-matched and strained channel. Also experiments were performed on devices with different source and drain ohmic contacts.
2) Experimental.Noise power spectra were recorded at room temperature using an Advantest R92 1 1B power spectrum analyser. Gate and drain DC biases were applied to the samples using voltage sources supplied by low noise batteries. The drain current noise spectrum sid was derived from the noise voltage Sv measured across a load resistance RI, through the relation where & is the drain to source impedance. The gate was connected directly to the voltage source (AC grounded). Measurements were performed in linear regime, that is for small drain to source voltages (Vd. LFN spectra are l/f-like and do not show any dominant generation-recombination component in the range of frequencies investigated (1 Hz -100 kHz). Details on the MBE growth of MODFET structures are given elsewhere [5]. Unless otherwise specified, the AlInAs and InGaAs layers were grown at 5OOOC.
3) Gate free structures.Experiments were first carried out on gate-free structures with channel lengths ranging from 5 to 160 pn. The channel width is kept constant at 150 pm. In the following, we will consider successively the contributions of the draii and source contacts, the influences of the AlInAs barrier layer surface, of the AlInAs barrier doping mode and of the AlInAs buffer growth interface and, finally, the effect of strain in the channel layer. The role played by deep traps in the AlInAs layers w i l l then be discussed.
3.1)Contributions of the drain and source contacts. If Sich and Sicont hold for the noise current sources of the channel and of the contacts respectively, Sid is given by Sid = (\h/%34sich + (&~nt/Rds)~~icont.where ...