2014
DOI: 10.1039/c3cp53023j
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Low-energy electron induced resonant loss of aromaticity: consequences on cross-linking in terphenylthiol SAMs

Abstract: Aromatic self-assembled monolayers (SAMs) can be used as negative tone electron resists in functional surface lithographic fabrication. A dense and resistant molecular network is obtained under electron irradiation through the formation of a cross-linked network. The elementary processes and possible mechanisms involved were investigated through the response of a model aromatic SAM, p-terphenylthiol SAM, to low-energy electron (0-10 eV) irradiation. Energy loss spectra as well as vibrational excitation functio… Show more

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Cited by 34 publications
(73 citation statements)
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“…As panel (C) of Figure (4) shows, the amount of destroyed rings could easily reach 50%. This is in accord with recent experimental investigations of a loss of aromaticity of terphenylthiol SAMs when being irradiated [17]. Nevertheless, the (remaining) intact phenyl rings seem to play an important role as a kind of matrix that stabilizes the resulting structures [28].…”
Section: Resultssupporting
confidence: 88%
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“…As panel (C) of Figure (4) shows, the amount of destroyed rings could easily reach 50%. This is in accord with recent experimental investigations of a loss of aromaticity of terphenylthiol SAMs when being irradiated [17]. Nevertheless, the (remaining) intact phenyl rings seem to play an important role as a kind of matrix that stabilizes the resulting structures [28].…”
Section: Resultssupporting
confidence: 88%
“…This suggests that the electron exposition (dose, time, energy) as well as the cooling dynamics play an important role for the actual structure. To mention just one aspect: In the real crosslinking process hydrogens are removed one by another in the course of time which could induce correlations for possible crosslinking pathways, namely where two hydrogens are removed at nearby sites [17]. Or is this not important and one can start the simulation – as we did – with hydrogen-free initial configurations?…”
Section: Resultsmentioning
confidence: 99%
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“…By assigning the vibrational modes, it is possible to evidence the chemical bonding between surface and adsorbate, between several adsorbates, or any chemical modification upon stimulation38394041.…”
mentioning
confidence: 99%